This topical review discusses recent development and trends on scanning micromirrors for
biomedical applications. This also includes a biomedical micro robot for precise …

In this paper, fully monolithic silicon optical scanners are demonstrated with large static
optical beam deflection. The main advantage of the scanners is their high speed of …

An optical tracking system can include at least one scanning detector having a scanning
mirror and one or more fixed photo-detectors located near the Scanning mirror. The scan …

A microfabrication technology has been developed and demonstrated, which enhances the
capabilities and applications of high aspect ratio silicon-on-insulator …

Fully monolithic gimbal-less micro-electro-mechanical-system (MEMS) devices with large
static optical beam deflection and fabrications methods are disclosed. The devices can …

F. Niklaus, S. Haasl and G. Stemme," Arrays of monocrystalline silicon micromirrors
fabricated using CMOS compatible transfer bonding.” J. of MEMS, v 12, n. 4, Aug. 2003, p …

A new single crystal silicon MicroElectroMechanical Systems (MEMS) fabrication process is
proposed using proton-implantation smart-cut technique. Compared to conventional silicon …

(57) ABSTRACT A MEMS system is disclosed. The system includes a MEMS device having
including a gimbal-less device mount sup ported by tWo or more bi-axial linkages. Each bi …

Monolithic high aspect ratio silicon micromirror devices were demonstrated with fully
isolated vertical comb drives micromachined from the back side and front side of a 50-μm …

A communication system between two autonomous micro air vehicles is proposed. Laser
communication offers advantages in range, power, and bandwidth when line of sight is …