Condition assessment and fault prognostics of microelectromechanical systems

K Medjaher, H Skima, N Zerhouni - Microelectronics Reliability, 2014 - Elsevier
Microelectromechanical systems (MEMS) are used in different applications such as
automotive, biomedical, aerospace and communication technologies. They create new …

Probabilistic analysis of a comb-drive actuator

S Goravar, S Chandrasekaran, A Zribi - IEEE Sensors Journal, 2010 - ieeexplore.ieee.org
In the present paper, we discuss about design methodology to study the reliability of a
microelectromechanical systems device. The proposed methodology was illustrated for …

Readout interfacing circuit for natural frequency detection of MEMS resonator: article

H Guliga - 2013 - ir.uitm.edu.my
This paper presents the readout interfacing circuit (ROIC) for natural frequency detection of
MEMS resonator. It is reported that the MEMS Resonator vibrate at specific natural …

[PDF][PDF] Testing and Characterization of 360 Rotating Out-of-Plane Micromirrors

T Dallas - 2009 - ttu-ir.tdl.org
Out-of-plane micromirrors have proved to be a vital component of Micro-Opto-Electro-
Mechanical Systems (MOEMS). These systems have been developed for a wide range of …

Testing and characterization of 360° rotating micromirrors

S Oak - 2009 - ttu-ir.tdl.org
The out-of-plane micromirrors have proved to be a vital component of Micro-Opto-Electro-
Mechanical Systems (MOEMS). These systems have been developed for wide range of …

[引用][C] ANALYSIS OF OPTICAL PERFORMANCE OF TUNABLE ETALON DURING SCANNING USING MICROMACHINED ACTUATOR