This paper is a review of the remarkable progress that has been made during the past few
decades in design, modeling, and fabrication of micromachined resonators. Although micro …

Advances in micro-and nanofabrication technologies have enabled the development of
novel micro-and nanomechanical resonators which have attracted significant attention due …

An overview of microelectromechanical systems (MEMS) resonators for frequency reference
and timing applications is presented. The progress made in the past few decades in design …

We present a new temperature compensation system for microresonator-based frequency
references. It consists of a phase-locked loop (PLL) whose inputs are derived from two …

Utilizing silicon and silicon dioxide's opposing temperature coefficients of Young's modulus,
composite resonators with zero linear temperature coefficient of frequency are fabricated …

In this paper, the temperature compensation of AlN Lamb wave resonators using edge-type
reflectors is theoretically studied and experimentally demonstrated. By adding a …

INTRODUCTION Nano-optomechanical systems (NOMS) are very small resonating
mechanical devices that have extraordinary sensitivity. The coupling of mechanical motion …

We report on the characterization, active tuning, and modeling of the first mode resonance
frequency of dielectric electroactive polymer (DEAP) membranes. Unlike other resonance …

In this letter, temperature compensation for aluminum nitride (AlN) Lamb wave resonators
operating at high temperature is presented. By adding a compensating layer of silicon …

This paper demonstrates the dependence of temperature coefficient of frequency (TCF) of
silicon micromechanical resonators on charge carrier concentration. TCF compensation is …