Resonance Type Auto Bias Electrical Variable Capacitor with Improved Switch Reliability for 13.56 MHz RF Plasma System
J Min, H Choi, Y Suh - … on Power Electronics and ECCE Asia …, 2023 - ieeexplore.ieee.org
This paper introduces auto bias electrical variable capacitor (EVC) with reduced active
components and voltage, current stress that mitigated switch noise for 13.56 MHz RF plasma …
components and voltage, current stress that mitigated switch noise for 13.56 MHz RF plasma …