Influence of negative bias voltage on structural and mechanical properties of nanocrystalline TiNx thin films treated in hot cathode arc discharge plasma system
Ti thin films were grown by DC sputtering on a glass substrate and then nitrided in a hot
cathode arc discharge plasma system, which is an effective approach to independently …
cathode arc discharge plasma system, which is an effective approach to independently …
Investigations on mechanical and electrical properties of N+ ions implanted TiN thin films
In the present work, we have grown titanium (Ti) thin films using DC sputtering system in
argon atmosphere. Ti films are implanted using low energy ion beam (having 70 keV …
argon atmosphere. Ti films are implanted using low energy ion beam (having 70 keV …