The field of microelectromechanical systems (MEMS) for photonic integrated circuits (PICs)
is reviewed. This field leverages mechanics at the nanometer to micrometer scale to improve …

Nonvolatile switching is still a missing functionality in current mainstream silicon photonics
complementary metal‐oxide‐semiconductor platforms. Fundamentally, nonvolatile switching …

Fast optical circuit switches (OCSs) with high port count offer reconfigurable bandwidth in
optical networks and have the potential to significantly increase the performance and …

We demonstrate a platform for phase and amplitude modulation in silicon nitride photonic
integrated circuits via piezo-optomechanical coupling using tightly mechanically coupled …

Silicon photonic devices consisting of nanowire waveguides are a promising technology for
on-chip integration in future optical telecommunication and interconnection systems based …

The convergence of Micro Electro Mechanical Systems (MEMS) and optics was, at the end
of the last century, a fertile ground for a new breed of technological and scientific …

In the European project MORPHIC we develop a platform for programmable silicon photonic
circuits enabled by waveguide-integrated micro-electro-mechanical systems (MEMS) …

Electrostatic comb-drive micro actuator with submicron comb fingers was connected to
silicon microring resonator to consist a wavelength-selective add-drop switch at 1.5 μm …

This article reviews mechanically-tunable photonic devices with on-chip integrated
MEMS/NEMS actuators. With related reports mostly published within the last decade, this …

We present a 1× 3 optical switch based on a translational microelectromechanical system
(MEMS) platform with integrated silicon nitride (SiN) photonic waveguides. The fabricated …