Pressures generated by external forces or by internal body processes represent parameters
of critical importance in diagnosing physiological health and in anticipating injuries …

Purpose Pressure, being one of the key variables investigated in scientific and engineering
research, requires critical and accurate measurement techniques. With the advancements in …

This paper provides an overview including developments, challenges with respect to design,
modelling, simulation and analysis of MEMS pressure sensors. Recently MEMS capacitive …

Small-sized, low-cost, and high-sensitivity sensors are required for pressure-sensing
applications because of their critical role in consumer electronics, automotive applications …

This paper presents the design and simulation of a MEMS based clamped capacitive
pressure sensor for blood pressure measurement. Normally, Blood pressure for human …

This experimental study presents the operation of pressure sensors made from low-
temperature flexible substrates. Design, simulation, fabrication, and characterization are …

This paper presents development and performance assessment of an innovative and a
highly potent graphene-electrolyte capacitive sensor (GECS) based on the supercapacitor …

This paper presents a touch mode MEMS capacitance diaphragm gauge for differential
pressure measurement. The design principle of the gauge is demonstrated, then the …

Paper has been pursued as an interesting substrate material for sensors in applications
such as microfluidics, bio-sensing of analytes and printed microelectronics. It offers …

In this paper we demonstrate a novel acoustic wave pressure sensor, based on an
aluminum nitride (AlN) piezoelectric thin film. It contains an integrated vacuum cavity, which …