Analog-to-digital converters based on sigma-delta modulators (ΣAM) are a popular choice
for high resolution conversion from the analog to the digital domain. With relatively small …

In this paper, we present a capacitive, MEMS-based accelerometer comprising an ultra-low
noise CMOS integrated readout-IC and a high-precision bulk micro machined sensing …

An ultrasensitive single-axis out-of-plane micro optical electro mechanical system (MOEMS)
accelerometer with a relatively low cross-axis sensitivity based on a designated …

The high-order mechanical resonances of the sensing element in a high-vacuum
environment can significantly degrade the noise and distortion performance of seismic …

In this paper we present a readout circuit for capacitive micro-electro-mechanical system
(MEMS) sensors such as accelerometers, gyroscopes or pressure sensors. A flexible …

This paper presents a novel single-side (111)-silicon (non-SOI) fabricated triaxis capacitive
microaccelerometer with a dual quantization electromechanical sigma-delta modulator (EM …

This paper presents a novel digital closed loop microelectromechanical system (MEMS)
accelerometer with the architecture and experimental evaluation. The complicated timing …

This paper proposes a subdivision interpolation technique for an<? TeX 3pc 0pt?> optical
accelerometer based on diffraction grating interferometry. The diffraction light intensity curve …

Accelerometers are among the legacy sensors impacted by the development of silicon
micromachining techniques. With pressure sensors, they were the first devices using this …

This paper presents a high performance lateral-axis capacitive electromechanical sigma-
delta modulator vibratory wheel gyroscope based on a dual quantization technique. The …