Millimeter-scale, micro-electro-mechanical systems gas turbine engines
AH Epstein - J. Eng. Gas Turbines Power, 2004 - asmedigitalcollection.asme.org
The confluence of market demand for greatly improved compact power sources for portable
electronics with the rapidly expanding capability of micromachining technology has made …
electronics with the rapidly expanding capability of micromachining technology has made …
Millimeter-scale, MEMS gas turbine engines
AH Epstein - Turbo Expo: Power for Land, Sea, and …, 2003 - asmedigitalcollection.asme.org
The confluence of market demand for greatly improved compact power sources for portable
electronics with the rapidly expanding capability of micromachining technology has made …
electronics with the rapidly expanding capability of micromachining technology has made …
High‐Strength Amorphous Silicon Carbide for Nanomechanics
For decades, mechanical resonators with high sensitivity have been realized using thin‐film
materials under high tensile loads. Although there are remarkable strides in achieving low …
materials under high tensile loads. Although there are remarkable strides in achieving low …
[图书][B] Handbook of silicon based MEMS materials and technologies
M Tilli, M Paulasto-Kröckel, M Petzold, H Theuss… - 2020 - books.google.com
Handbook of Silicon Based MEMS Materials and Technologies, Third Edition is a
comprehensive guide to MEMS materials, technologies, and manufacturing with a particular …
comprehensive guide to MEMS materials, technologies, and manufacturing with a particular …
[图书][B] Ultrananocrystalline diamond: synthesis, properties and applications
OA Shenderova, DM Gruen - 2012 - books.google.com
Ultrananocrystalline Diamond: Synthesis, Properties, and Applications is a unique practical
reference handbook. Written by the leading experts worldwide it introduces the science of …
reference handbook. Written by the leading experts worldwide it introduces the science of …
Deep reactive ion etching
F Laermer, S Franssila, L Sainiemi, K Kolari - Handbook of silicon based …, 2020 - Elsevier
This chapter discusses reactive ion etching (RIE) and deep RIE (DRIE) on wafers detailing
the various equipment and reactor requirements for different applications. The Bosch …
the various equipment and reactor requirements for different applications. The Bosch …
Effect of process parameters on the surface morphology and mechanical performance of silicon structures after deep reactive ion etching (DRIE)
The ability to predict and control the influence of process parameters during silicon etching
is vital for the success of most MEMS devices. In the case of deep reactive ion etching …
is vital for the success of most MEMS devices. In the case of deep reactive ion etching …
Strength and sharp contact fracture of silicon
RF Cook - Journal of Materials Science, 2006 - Springer
The fracture strength of Si is considered in the context of yield and reliability of
microelectronic and microelectromechanical (MEMS) devices. An overview of Si fracture …
microelectronic and microelectromechanical (MEMS) devices. An overview of Si fracture …
A critical review of microscale mechanical testing methods used in the design of microelectromechanical systems
VT Srikar, SM Spearing - Experimental mechanics, 2003 - Springer
Microelectromechanical systems (MEMS) technologies are evolving at a rapid rate with
increasing activity in the design, fabrication, and commercialization of a wide variety of …
increasing activity in the design, fabrication, and commercialization of a wide variety of …
Micro-heat engines, gas turbines, and rocket engines-The MIT microengine project
A Epstein, S Senturia, O Al-Midani… - 28th Fluid dynamics …, 1997 - arc.aiaa.org
This is a report on work in progress on microelectrical and mechanical systems (MEMS)-
based gas turbine engines, turbogenerators, and rocket engines currently under …
based gas turbine engines, turbogenerators, and rocket engines currently under …