This topical review discusses recent development and trends on scanning micromirrors for
biomedical applications. This also includes a biomedical micro robot for precise …

Micro-electro-mechanical systems (MEMS)-based cross-connects are widely used for all-
optical switching in recent optical networks. This paper provides a brief overview of various …

This paper reports a 1-mm/sup 2/, two-axis, single-crystalline-silicon (SCS)-based aluminum-
coated scanning micromirror with large rotation angle (up to 40/spl deg/), which can be used …

This paper reports new RF microelectromechanical systems (MEMS) switches actuated by
the combination of electromagnetic and electrostatic forces for low-voltage and low-power …

This paper presents the design, fabrication and characterization of a piezoelectrically
actuated high-fill-factor tip-tilt-piston (TTP) micromirror with small tilt and lateral shift during …

This paper presents an electromagnetic MEMS mirror technology for use in 3-D optical
switching applications. These mirrors may be actuated through large angles at low voltage …

Early cancer detection has been playing an important role in reducing cancer mortality.
Optical coherence tomography (OCT), due to its micron‐scale resolution, has the ability to …

Micro scanning mirrors are quite versatile MEMS devices for the deflection of a laser beam
or a shaped beam from another light source. The most exciting application is certainly in …

This paper reports the design, fabrication and operation of a two-dimensional (2D)
micromirror that can generate large bi-directional scans at low actuation voltages. This …

Disclosed is a micromirror actuator having a tWo-axis free dom and actuated by an
electromagnetic force and fabrica tion method thereof. The micromirror actuator includes a …