[HTML][HTML] Scanning micromirror platform based on MEMS technology for medical application
This topical review discusses recent development and trends on scanning micromirrors for
biomedical applications. This also includes a biomedical micro robot for precise …
biomedical applications. This also includes a biomedical micro robot for precise …
A comparative review of MEMS-based optical cross-connects for all-optical networks from the past to the present day
M Stepanovsky - IEEE Communications Surveys & Tutorials, 2019 - ieeexplore.ieee.org
Micro-electro-mechanical systems (MEMS)-based cross-connects are widely used for all-
optical switching in recent optical networks. This paper provides a brief overview of various …
optical switching in recent optical networks. This paper provides a brief overview of various …
A two-axis electrothermal micromirror for endoscopic optical coherence tomography
This paper reports a 1-mm/sup 2/, two-axis, single-crystalline-silicon (SCS)-based aluminum-
coated scanning micromirror with large rotation angle (up to 40/spl deg/), which can be used …
coated scanning micromirror with large rotation angle (up to 40/spl deg/), which can be used …
A low-voltage and low-power RF MEMS series and shunt switches actuated by combination of electromagnetic and electrostatic forces
This paper reports new RF microelectromechanical systems (MEMS) switches actuated by
the combination of electromagnetic and electrostatic forces for low-voltage and low-power …
the combination of electromagnetic and electrostatic forces for low-voltage and low-power …
A piezoelectric unimorph actuator based tip-tilt-piston micromirror with high fill factor and small tilt and lateral shift
This paper presents the design, fabrication and characterization of a piezoelectrically
actuated high-fill-factor tip-tilt-piston (TTP) micromirror with small tilt and lateral shift during …
actuated high-fill-factor tip-tilt-piston (TTP) micromirror with small tilt and lateral shift during …
Electromagnetically actuated mirror arrays for use in 3-D optical switching applications
JJ Bernstein, WP Taylor, JD Brazzle… - Journal of …, 2004 - ieeexplore.ieee.org
This paper presents an electromagnetic MEMS mirror technology for use in 3-D optical
switching applications. These mirrors may be actuated through large angles at low voltage …
switching applications. These mirrors may be actuated through large angles at low voltage …
MEMS‐Based Endoscopic Optical Coherence Tomography
Early cancer detection has been playing an important role in reducing cancer mortality.
Optical coherence tomography (OCT), due to its micron‐scale resolution, has the ability to …
Optical coherence tomography (OCT), due to its micron‐scale resolution, has the ability to …
Applications and requirements for MEMS scanner mirrors
A Wolter, ST Hsu, H Schenk… - … miniaturized systems V, 2005 - spiedigitallibrary.org
Micro scanning mirrors are quite versatile MEMS devices for the deflection of a laser beam
or a shaped beam from another light source. The most exciting application is certainly in …
or a shaped beam from another light source. The most exciting application is certainly in …
A single-crystal silicon micromirror for large bi-directional 2D scanning applications
A Jain, H Xie - Sensors and Actuators A: Physical, 2006 - Elsevier
This paper reports the design, fabrication and operation of a two-dimensional (2D)
micromirror that can generate large bi-directional scans at low actuation voltages. This …
micromirror that can generate large bi-directional scans at low actuation voltages. This …
Electromagnetically actuated micromirror actuator and fabrication method thereof
Disclosed is a micromirror actuator having a tWo-axis free dom and actuated by an
electromagnetic force and fabrica tion method thereof. The micromirror actuator includes a …
electromagnetic force and fabrica tion method thereof. The micromirror actuator includes a …