Ruthenium catalyst processing and oxidation for scalable complementary metal-oxide-semiconductor-compatible metal-assisted chemical etch

M Hrdy, A Mallavarapu, RL Galindo… - Journal of Micro …, 2024 - spiedigitallibrary.org
Background Metal-assisted chemical etching (MacEtch) of Si is a catalyst-based etch
technique that has demonstrated better performance at attaining high-aspect ratio structures …

Scalable Au Metal-Assisted Chemical Etch Nanopatterning Using Enhanced Metal Break Techniques

M Hrdy, A Mallavarapu… - Journal of Micro …, 2023 - asmedigitalcollection.asme.org
This paper presents catalyst patterning techniques for promoting wafer-scale uniformity
while producing taper-free high aspect ratio Si nanostructures using gold (Au) metal …

Reducing manufacturing constraints of metal-assisted chemical etching

M Hrdy - 2024 - repositories.lib.utexas.edu
Integrated circuits, advanced sensors, and photovoltaics are just a subset of the
technologies enabled by high throughput silicon nanomanufacturing. The manufacturing of …

In-plane synthesis of silicon microwires array for optoelectronic and microelectronic applications; a TCAD study

HD Jahromi, A Sanaei - 2023 - researchsquare.com
Silicon microwires have been used in various applications such as sensors, solar cells, and
lithium-ion batteries due to their high surface area-to-volume ratio and good electrical …

Platinum assisted chemical etching of single-and poly-crystalline silicon with applications to templated nanomaterials

C Barrera - 2023 - repositories.lib.utexas.edu
When emerging nanofabrication techniques are explored for improved performance in
semiconductor device fabrication, they need to substantially improve in their performance …