[HTML][HTML] State of the art and future perspectives in advanced CMOS technology

HH Radamson, H Zhu, Z Wu, X He, H Lin, J Liu… - Nanomaterials, 2020 - mdpi.com
The international technology roadmap of semiconductors (ITRS) is approaching the
historical end point and we observe that the semiconductor industry is driving …

Nanomaterials in transistors: From high-performance to thin-film applications

AD Franklin - Science, 2015 - science.org
BACKGROUND Transistors are one of the most enabling “hidden” technologies of all time
and have facilitated the development of computers, the Internet, thin mobile displays, and …

Considerations for ultimate CMOS scaling

KJ Kuhn - IEEE transactions on Electron Devices, 2012 - ieeexplore.ieee.org
This review paper explores considerations for ultimate CMOS transistor scaling. Transistor
architectures such as extremely thin silicon-on-insulator and FinFET (and related …

FinFET versus gate-all-around nanowire FET: Performance, scaling, and variability

D Nagy, G Indalecio, AJ Garcia-Loureiro… - IEEE Journal of the …, 2018 - ieeexplore.ieee.org
Performance, scalability, and resilience to variability of Si SOI FinFETs and gate-all-around
(GAA) nanowires (NWs) are studied using in-house-built 3-D simulation tools. Two …

[HTML][HTML] Atomic layer etching at the tipping point: an overview

GS Oehrlein, D Metzler, C Li - … Journal of Solid State Science and …, 2015 - iopscience.iop.org
The ability to achieve near-atomic precision in etching different materials when transferring
lithographically defined templates is a requirement of increasing importance for nanoscale …

[HTML][HTML] A review of the gate-all-around nanosheet FET process opportunities

S Mukesh, J Zhang - Electronics, 2022 - mdpi.com
In this paper, the innovations in device design of the gate-all-around (GAA) nanosheet FET
are reviewed. These innovations span enablement of multiple threshold voltages and …

Method of constructing a semiconductor device and structure

Z Or-Bach, DC Sekar, B Cronquist, I Beinglass… - US Patent …, 2012 - Google Patents
2011-12-06 Assigned to MONOLITHIC 3D INC. reassignment MONOLITHIC 3D INC.
ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). Assignors …

Gate-all-around silicon nanowire 25-stage CMOS ring oscillators with diameter down to 3 nm

S Bangsaruntip, A Majumdar, GM Cohen… - 2010 symposium on …, 2010 - ieeexplore.ieee.org
We demonstrate the world's first top-down CMOS ring oscillators (ROs) fabricated with gate-
all-around (GAA) silicon nanowire (NW) FETs having diameters as small as 3 nm. NW …

The evolution of scaling from the homogeneous era to the heterogeneous era

M Bohr - 2011 international electron devices meeting, 2011 - ieeexplore.ieee.org
Traditional MOSFET scaling served our industry well for more than three decades by
providing continuous improvements in transistor performance, power and cost. This was the …

[HTML][HTML] Vertical silicon nanowire field effect transistors with nanoscale gate-all-around

Y Guerfi, G Larrieu - Nanoscale research letters, 2016 - Springer
Nanowires are considered building blocks for the ultimate scaling of MOS transistors,
capable of pushing devices until the most extreme boundaries of miniaturization thanks to …