High-throughput thermodynamic study of SiC high-temperature chemical vapor deposition from TMS-H2
P Lu, W Huang, J Wang, H Yang, S Guo, B Li… - Journal of Crystal …, 2024 - Elsevier
A systematic study on the tetramethylsilane-hydorgen (TMS-H 2) system by high-throughput
thermodynamic method is conducted with a large experimental condition range (500∼ 2700 …
thermodynamic method is conducted with a large experimental condition range (500∼ 2700 …