The dynamics of the out-of-plane comb-drive actuator used in a torsional resonant mode
microscanner is discussed. The microscanner is fabricated using the standard SOI …

This paper presents a finite element method (FEM) simulation study for the frequency
response analysis of a capacitive comb-drive resonator based on micro-electro-mechanical …

Accurate prediction of the dynamic behavior of comb-driven MEMS microscanners is
important to optimize the actuator and structure design. In this paper, a numerical and an …

Dynamic behavior of a comb-driven torsional microscanner is governed by a nonlinear
parametric differential equation. Theoretically, such systems have multiple resonances …

A small form factor, tunable laser source using three advanced comb-drive actuators has
demonstrated the performance required for transmitting 10Gb/s over distances greater than …

Flexure bearing systems and configurations guide translational motion along a single-axis in
micro and macro applications such as micro-electro-mechanical system (MEMS) devices …

A new method is proposed in design of comb-drive actuators for specific voltage-
displacement characteristics with finger gaps as the design parameters. The design method …

New DRIE actuator systems have been developed which use a high-force, linear actuator to
wrap a flexible brake band around the rigid brake shoe of a large-deflection, rotary actuator …

Microscanners produced using MEMS technology enable light manipulation at a size,
precision, and speed that is far beyond the limits of conventional machining. Microscanners …

Gegenstand dieser Arbeit ist die Entwicklung faseroptischer Schaltmodule. Hierzu werden
Einsatzgebiete beschrieben und ein systematisierender Vergleich über optische Schalter …