In this paper, a thin film PZT MEMS actuator feedback controlled with integrated buried
piezoresistors is reported. Two PID controllers were used to implement a phase-locked loop …

This article discusses the challenges in implementing a fully electrical closed-loop control
system for high-end applications of quasi-static microscanners, accounting at the same time …

In this paper, an angular position sensor (APS) designed for a resonant miniaturized
scanning mirror (M-SM) is presented. The APS operates based on the principle of differential …

Light Detection and Ranging (LiDAR) devices are critical for constructing three-dimensional
scenes around vehicles, making them essential for automatic and intelligent driving systems …

A smart digital micromirror device (DMD) was employed to realize the on-chip scanning in
versatile hyperspectral imaging (HSI) systems in our previous research. However, the …

This paper reports on a 1D PZT micromirror integrated with buried piezoresistors for quasi-
static feedback position control. The piezoresistors located along or below the PZT actuators …

This paper proposes a design and fabrication method to address the technical challenges
associated with the design and fabrication of large-size Micro Electro Mechanical Systems …

This letter presents a comparative study concerning the characterization of piezoresistive
(PZR) and piezoelectric (PZT) tilt-angle sensing in MEMS micromirrors. Position tracking is …

This paper presents the design, simulation, fabrication, and characterization of a novel large-
scan-range electrothermal micromirror integrated with a pair of position sensors. Note that …

The angular motion of quasi-static micromirrors used for raster scanning projection
applications is typically affected by undesired oscillations related to high-frequency resonant …