A silicon deep reactive-ion etching (DRIE) process has been developed, using multiple SiO
2 masks to enable multidepth waveguide features with±2% tolerance. The unique capability …

This paper presents a novel micromachined actuator which is developed to produce precise
and unlimited displacement. The actuator is driven by impact force between a silicon micro …

Polymethyl methacrylate (PMMA) has been proposed as a material for micro-
electromechanical systems (MEMS) to initiate the research on environmentally friendly micro …

This paper presents the design, fabrication process, experimental characterizations and
simulations of a novel passive micro gas regulator. The device is to be used in a miniature …

A fully packagable micromachined actuator was developed for generating precise but
unlimited displacement. A suspended silicon mass is encapsulated between glass plates …

This paper presents a novel fabrication process for monolithic PMMA (
polymethylmethacrylate) vertical comb-drive actuators utilizing hot embossing, surface …

We investigated the characteristics of microfluidic devices fabricated using photosensitive
sheets adhered to substrates. We evaluated them in regard to practical criteria, namely …

An absolute micro-encoder based on code imaging is demonstrated. As the lens for the
code imaging, a◊ 300 µm ball lens is assembled inside the cavity between wafer-bonded …

We report the fabrication and evaluation of a PMMA electrostatic comb-drive microactuator
using hot embossing and ultra-precision cutting technology. First, a two-step silicon mold is …

A fabrication method for making accurate double-height micromolds is presented. Fine
features of the micromold are transferred to a three-dimensional poly-dimethylsiloxane …