[HTML][HTML] Recent advancements in multifunctional applications of sol-gel derived polymer incorporated TiO2-ZrO2 composite coatings: A comprehensive review
Despite the fact that metal oxides have gained a foothold into a range of structural
applications over the last decade, their investigation in the field of sensors, supercapacitors …
applications over the last decade, their investigation in the field of sensors, supercapacitors …
[HTML][HTML] Mechanical and optical properties of as-grown and thermally annealed titanium dioxide from titanium tetrachloride and water by atomic layer deposition
OME Ylivaara, A Langner, X Liu, D Schneider, J Julin… - Thin Solid Films, 2021 - Elsevier
The use of thin-films made by atomic layer deposition (ALD) is increasing in the field of
optical sensing. ALD TiO 2 has been widely characterized for its physical and optical …
optical sensing. ALD TiO 2 has been widely characterized for its physical and optical …
Hollow atomic force microscopy cantilevers with nanoscale wall thicknesses
In atomic force microscopy, the cantilever probe is a critical component whose properties
determine the resolution and speed at which images with nanoscale resolution can be …
determine the resolution and speed at which images with nanoscale resolution can be …
MOS Capacitance Measurements for PEALD TiO2 Dielectric Films Grown under Different Conditions and the Impact of Al2O3 Partial-Monolayer Insertion
In this paper, we report the plasma-enhanced atomic layer deposition (PEALD) of TiO2 and
TiO2/Al2O3 nanolaminate films on p-Si (100) to fabricate metal-oxide-semiconductor (MOS) …
TiO2/Al2O3 nanolaminate films on p-Si (100) to fabricate metal-oxide-semiconductor (MOS) …
Tribological study of hafnium dioxide and aluminium oxide films grown by atomic layer deposition on glass substrate
In the present work we studied the mechanical properties of hafnium dioxide (HfO 2) and
aluminium oxide (Al 2 O 3) thin films deposited on glass at low temperature by means of …
aluminium oxide (Al 2 O 3) thin films deposited on glass at low temperature by means of …
Comparison of mechanical properties and composition of magnetron sputter and plasma enhanced atomic layer deposition aluminum nitride films
P Sippola, A Pyymaki Perros, OME Ylivaara… - Journal of Vacuum …, 2018 - pubs.aip.org
A comparative study of mechanical properties and elemental and structural composition was
made for aluminum nitride thin films deposited with reactive magnetron sputtering and …
made for aluminum nitride thin films deposited with reactive magnetron sputtering and …
Adaptive nanolaminate coating by atomic layer deposition
Atomic layer deposition (ALD) was used to deposit ZnO/Al 2 O 3/V 2 O 5 nanolaminate
coatings to demonstrate a coating system with temperature adaptive frictional behaviour …
coatings to demonstrate a coating system with temperature adaptive frictional behaviour …