Head-worn display design is inherently an interdisciplinary subject fusing optical
engineering, optical materials, optical coatings, electronics, manufacturing techniques, user …

This contribution presents an overview of advances in scanning micromirrors based on
MEMS (Micro-electro-mechanical systems) technologies to achieve beam scanning for OCT …

A micro scanning mirror is an optical device used to scan laser beams which can be used for
Light Detection and Ranging (LiDAR) in applications like unmanned driving or Unmanned …

The dynamics of the out-of-plane comb-drive actuator used in a torsional resonant mode
microscanner is discussed. The microscanner is fabricated using the standard SOI …

Stiffness constant and effective mass are two important parameters in the performance
analysis of an accelerometer. Their values depend mostly on the structural design of the …

This article presents the design, manufacturing, and evaluation of a scanning mirror system
based on a novel resonant rotational reluctance actuator. The system comprises a …

Transparent optical circuit switching can improve the aggregate bandwidth, scalability, and
cost of data center networks provided, it can meet the performance requirements on …

MEMS-based LiDAR has the advantages of low cost and small volume, but suffers from
finding a trade-off between the detection range and angular resolution in coaxial solution …

Resonant mode polymer-based electromagnetic scanners are developed for barcode
reading applications. The electromagnetic scanner consists of a mirror suspended by a …

In this paper present, an electrostatic actuation mechanism based on the interdigitated
electrode for the Biomedical Micro Electro Mechanical Systems (Bio-MEMS) sensors was …