Physics of laser-driven tin plasma sources of EUV radiation for nanolithography

OO Versolato - Plasma Sources Science and Technology, 2019 - iopscience.iop.org
Laser-produced transient tin plasmas are the sources of extreme ultraviolet (EUV) light at
13.5 nm wavelength for next-generation nanolithography, enabling the continued …

Microdroplet-tin plasma sources of EUV radiation driven by solid-state-lasers (Topical Review)

OO Versolato, J Sheil, S Witte, W Ubachs… - Journal of …, 2022 - iopscience.iop.org
Plasma produced from molten-tin microdroplets generates extreme ultraviolet light for state-
of-the-art nanolithography. Currently, CO 2 lasers are used to drive the plasma. In the future …

Microemulsification from single laser-induced cavitation bubbles

KA Raman, JM Rosselló, H Reese… - Journal of Fluid …, 2022 - cambridge.org
We study the interaction between a laser-induced cavitation bubble and a submillimetre-
sized water droplet submerged in silicone oil. High-speed imaging reveals the pathways …

Efficient Generation of Extreme Ultraviolet Light From :YAG-Driven Microdroplet-Tin Plasma

R Schupp, F Torretti, RA Meijer, M Bayraktar… - Physical Review …, 2019 - APS
We experimentally investigate the emission of EUV light from a mass-limited laser-produced
plasma over a wide parameter range by varying the diameter of the targeted tin …

Observation of plasma inflows in laser-produced Sn plasma and their contribution to extreme-ultraviolet light output enhancement

K Tomita, Y Pan, A Sunahara, K Kouge, H Mizoguchi… - Scientific reports, 2023 - nature.com
Plasma dynamics are governed by electron density (ne), electron temperature (T e), and
radiative energy transfer as well as by macroscopic flows. However, plasma flow-velocity …

Drop fragmentation by laser-pulse impact

AL Klein, D Kurilovich, H Lhuissier… - Journal of fluid …, 2020 - cambridge.org
We study the fragmentation of a liquid drop that is hit by a laser pulse. The drop expands into
a thin sheet that breaks by the radial expulsion of ligaments from its rim and the nucleation …

Attenuation and inflection of initially planar shock wave generated by femtosecond laser pulse

VV Shepelev, YV Petrov, NA Inogamov… - Optics & Laser …, 2022 - Elsevier
Evolution of wavefront geometry during propagation and attenuation of initially planar shock
waves generated by femtosecond laser pulses in aluminum is studied. We demonstrate that …

[HTML][HTML] Simulations of plasmas driven by laser wavelengths in the 1.064—10.6 μm range for their characterization as future extreme ultraviolet light sources

DJ Hemminga, OO Versolato, J Sheil - Physics of Plasmas, 2023 - pubs.aip.org
We characterize the properties of extreme ultraviolet (EUV) light source plasmas driven by
laser wavelengths in the λ laser= 1.064− 10.6 μ m range and laser intensities of I laser= 0.5 …

Laser-induced, single droplet fragmentation dynamics revealed through megahertz x-ray microscopy

F Reuter, T Sato, V Bellucci, S Birnsteinova, C Deiter… - Physics of …, 2023 - pubs.aip.org
The fragmentation dynamics of single water droplets from laser irradiation is studied with
megahertz frame rate x-ray microscopy. Owed to the nearly refraction-free and penetrating …

Recent advances in molecular dynamics of metal laser-processed nanoparticles: A review

W Ming, S Hu, Z Xie, F Zhang, G Zhang, X Guo… - Optics & Laser …, 2024 - Elsevier
Nanoparticles are the key in nanotechnology and nano science, and are widely
implemented in various domains, including biochemistry, biophysics, and nanoscience …