Micromachining of alumina ceramic for microsystems applications: a systematic review, challenges and future opportunities
This review article presents the current status of various micromachining techniques used to
create microfeatures in alumina ceramic. Alumina has emerged as an advanced substrate in …
create microfeatures in alumina ceramic. Alumina has emerged as an advanced substrate in …
Developments, challenges and future trends in advanced sustainable machining technologies for preparing array micro-holes
Y Liu, P Ouyang, Z Zhang, H Zhu, X Chen, Y Wang… - Nanoscale, 2024 - pubs.rsc.org
The utilization of array micro-holes is becoming increasingly prevalent across a range of
industries, including aerospace, automotive, electronics, medical and chemical. Advanced …
industries, including aerospace, automotive, electronics, medical and chemical. Advanced …
Gas bubbles entrapment mechanism in the electrochemical discharge machining involving multi-tip array electrodes
This article addresses the gas bubble entrapment issue for the first time when a multi-tip tool
array (MTA) is used in electrochemical discharge machining (ECDM). During the …
array (MTA) is used in electrochemical discharge machining (ECDM). During the …
Electrochemical discharge machining of a high-precision micro-holes array in a glass wafer using a damping and confinement technique
Z Zou, K Chan, S Qiao, K Zhang, T Yue, Z Guo… - Journal of Manufacturing …, 2023 - Elsevier
Due to the unstable gas film, it is still a big challenge to achieve high repeatability and
quality in electrochemical discharge machining (ECDM) of micro-hole arrays in glass. Based …
quality in electrochemical discharge machining (ECDM) of micro-hole arrays in glass. Based …
Localized surface roughening to improve adhesion of electroless seed layer in through-glass vias
This article reports the improvement of the adhesion of the electroless seed layer deposited
on glass substrates used in creating through-glass vias (TGV) by localized surface …
on glass substrates used in creating through-glass vias (TGV) by localized surface …
Towards void-free copper filling of low-aspect-ratio heat dissipation through holes in packaging substrate with high H2SO4 concentration electroplating system
Z Wang, P Su, Y Peng, M Chen, Q Wang - Journal of Industrial and …, 2025 - Elsevier
The void-free filling of high-density low aspect ratio (AR≤ 5) through holes (THs) in the
packaging substrate is beneficial for promoting the integration, reliability, and heat …
packaging substrate is beneficial for promoting the integration, reliability, and heat …
Fabrication of 3D microstructures in glass by direct writing electrochemical discharge machining
The formation of 3D copper-filled microstructures in glass using direct writing
electrochemical discharge machining (ECDM) and electrodeposition techniques is …
electrochemical discharge machining (ECDM) and electrodeposition techniques is …
Facilitating electroless metalization of blind holes in glass substrates by electrochemical discharge-assisted surface roughening
This study introduces a novel approach involving the utilization of electrochemical
discharges (ECD) to roughen a glass substrate to enhance the electroless metalization …
discharges (ECD) to roughen a glass substrate to enhance the electroless metalization …
Continuous electroless seed layer deposition in through-glass-vias by ultrasonic agitation
This study presents the crucial process of achieving conformal electroless seed layer
deposition within blind glass vias. A cost-effective and room-temperature-based ultrasonic …
deposition within blind glass vias. A cost-effective and room-temperature-based ultrasonic …
Investigations into velocity decay, initial tool-workpiece gap, and material removal behaviour in ultrasonic micromachining
A dynamic impact-based numerical model is presented to estimate the cross-sectional
profiles of deep vias having depths up to 1 mm, created in glass by ultrasonic …
profiles of deep vias having depths up to 1 mm, created in glass by ultrasonic …