Micromachining of alumina ceramic for microsystems applications: a systematic review, challenges and future opportunities

A Shanu, P Sharma, P Dixit - Materials and Manufacturing …, 2024 - Taylor & Francis
This review article presents the current status of various micromachining techniques used to
create microfeatures in alumina ceramic. Alumina has emerged as an advanced substrate in …

Developments, challenges and future trends in advanced sustainable machining technologies for preparing array micro-holes

Y Liu, P Ouyang, Z Zhang, H Zhu, X Chen, Y Wang… - Nanoscale, 2024 - pubs.rsc.org
The utilization of array micro-holes is becoming increasingly prevalent across a range of
industries, including aerospace, automotive, electronics, medical and chemical. Advanced …

Gas bubbles entrapment mechanism in the electrochemical discharge machining involving multi-tip array electrodes

J Arab, P Dixit - Journal of Manufacturing Processes, 2023 - Elsevier
This article addresses the gas bubble entrapment issue for the first time when a multi-tip tool
array (MTA) is used in electrochemical discharge machining (ECDM). During the …

Electrochemical discharge machining of a high-precision micro-holes array in a glass wafer using a damping and confinement technique

Z Zou, K Chan, S Qiao, K Zhang, T Yue, Z Guo… - Journal of Manufacturing …, 2023 - Elsevier
Due to the unstable gas film, it is still a big challenge to achieve high repeatability and
quality in electrochemical discharge machining (ECDM) of micro-hole arrays in glass. Based …

Localized surface roughening to improve adhesion of electroless seed layer in through-glass vias

H Pandey, K Pawar, P Dixit - Materials Science in Semiconductor …, 2024 - Elsevier
This article reports the improvement of the adhesion of the electroless seed layer deposited
on glass substrates used in creating through-glass vias (TGV) by localized surface …

Towards void-free copper filling of low-aspect-ratio heat dissipation through holes in packaging substrate with high H2SO4 concentration electroplating system

Z Wang, P Su, Y Peng, M Chen, Q Wang - Journal of Industrial and …, 2025 - Elsevier
The void-free filling of high-density low aspect ratio (AR≤ 5) through holes (THs) in the
packaging substrate is beneficial for promoting the integration, reliability, and heat …

Fabrication of 3D microstructures in glass by direct writing electrochemical discharge machining

DK Mishra, P Dixit - Materials and Manufacturing Processes, 2023 - Taylor & Francis
The formation of 3D copper-filled microstructures in glass using direct writing
electrochemical discharge machining (ECDM) and electrodeposition techniques is …

Facilitating electroless metalization of blind holes in glass substrates by electrochemical discharge-assisted surface roughening

K Pawar, P Dixit - Materials Letters, 2024 - Elsevier
This study introduces a novel approach involving the utilization of electrochemical
discharges (ECD) to roughen a glass substrate to enhance the electroless metalization …

Continuous electroless seed layer deposition in through-glass-vias by ultrasonic agitation

K Pawar, H Pandey, P Dixit - IEEE Transactions on …, 2024 - ieeexplore.ieee.org
This study presents the crucial process of achieving conformal electroless seed layer
deposition within blind glass vias. A cost-effective and room-temperature-based ultrasonic …

Investigations into velocity decay, initial tool-workpiece gap, and material removal behaviour in ultrasonic micromachining

H Pandey, A Apurva, P Dixit - Journal of Manufacturing Processes, 2024 - Elsevier
A dynamic impact-based numerical model is presented to estimate the cross-sectional
profiles of deep vias having depths up to 1 mm, created in glass by ultrasonic …