Unequal areas of the powered and grounded electrodes in single-frequency capacitively
coupled plasmas (CCPs) are well-known to generate a DC self-bias voltage and an …

Capacitive radio frequency (RF) discharge plasmas have been serving hi-tech industry (eg
chip and solar cell manufacturing, realization of biocompatible surfaces) for several years …

In low temperature plasmas, the interaction of the electrons with the electric field is an
important current research topic that is relevant for many applications. Particularly, in the low …

Low pressure capacitive radio frequency (RF) plasmas are often described by equivalent
circuit models based on fluid approaches that predict the self-excitation of resonances, eg …

Two classic radio-frequency (RF) plasmas, ie, the capacitively and the inductively coupled
plasmas (CCP and ICP), are widely employed in material processing, eg, etching and thin …

In simulation as well as analytical modeling studies of low-pressure capacitively coupled
radio frequency (CCRF) discharges, the assumption of both a driving voltage source or a …

The electrical asymmetry effect (EAE) enables separate control of the ion flux and the mean
ion energy in capacitively coupled plasmas (CCP). While a variety of plasma processing …

It is well-known that standing waves having radially center-high rf voltage profiles exist in
high frequency capacitive discharges. It is also known that in radially uniform discharges, the …

In capacitively coupled radio frequency discharges driven by two consecutive phase-locked
harmonics, the electrical asymmetry effect (EAE) allows one to generate a dc self-bias as a …

In geometrically symmetric capacitive radio-frequency plasmas driven by two consecutive
harmonics, a dc self-bias can be generated as a function of the phase shift between the …