It has been a strong desire for researchers to control material growth at the molecular and
atomic levels. Molecular and atomic layer deposition (MLD and ALD) are two such …

Atomic layer deposition (ALD) for high‐quality conformal inorganic thin films is one of the
cornerstones of modern microelectronics, while molecular layer deposition (MLD) is its less …

Rechargeable batteries are taking an ever-increasingly important role in our society. Their
performance (such as cell cyclability, safety, and lifespan) is critical for their applications …

In the past decade, atomic and molecular layer deposition (ALD and MLD), these two sister
techniques have been attracting more and more research attention to address technical …

Molecular layer deposition (MLD) offers the deposition of ultrathin and conformal organic or
hybrid films which have a wide range of applications. However, some critical potential …

Nanostructured materials (NMs) are the materials with a microscopic structure of 1–100
nanometers. NMs can outperform their bulk counterparts, due to their reduced sizes. In terms …

As the patterning technology used for manufacturing highly integrated devices continues to
develop in the current semiconductor market, sophisticated technology nodes of 5 nm or …

This chapter gives a comprehensive survey on molecular layer deposition (MLD) processes
for growing organic–inorganic hybrid materials. We summarize these MLD processes with …

Nanoscience and nanotechnology are playing an ever-increasing importance in our society.
Scientists and engineers have been striving to manipulate atoms and molecules precisely at …