'Old Chemistries' for new applications: Perspectives for development of precursors for MOCVD and ALD applications

A Devi - Coordination chemistry reviews, 2013 - Elsevier
The concept of the transformation of molecules to materials has been well established in the
field of chemical vapor deposition (CVD) and atomic layer deposition (ALD). However …

Recent progress in the chemistry of metal amidinates and guanidinates: syntheses, catalysis and materials

FT Edelmann - Advances in organometallic chemistry, 2013 - Elsevier
This review provides a comprehensive overview of the most recent progress in chemistry
and applications of metal complexes containing heteroallylic ligands such as amidinates …

Surface chemistry of copper (I) acetamidinates in connection with atomic layer deposition (ALD) processes

Q Ma, H Guo, RG Gordon, F Zaera - Chemistry of Materials, 2011 - ACS Publications
The thermal chemistry of copper (I)-N, N′-di-sec-butylacetamidinate on Ni (110) single-
crystal and cobalt polycrystalline surfaces was characterized under ultrahigh vacuum (UHV) …

Laser CVD Growth of Uniquely <010>‐oriented β‐Ga2O3 Films on Quartz Substrate with Ultrafast Photoelectric Response

R Tu, X Li, Q Xu, T Gao, X Zhang, BW Li, S Zhang… - Small, 2023 - Wiley Online Library
The oriented growth of β‐Ga2O3 films has triggered extensive interest due to the remarkable
and complex anisotropy found in the β‐Ga2O3 bulks. Remarkable properties, including …

Guanidinates as Alternative Ligands for Organometallic Complexes

F Carrillo-Hermosilla, R Fernández-Galán, A Ramos… - Molecules, 2022 - mdpi.com
For decades, ligands such as phosphanes or cyclopentadienyl ring derivatives have
dominated Coordination and Organometallic Chemistry. At the same time, alternative …

PEALD of HfO2 Thin Films: Precursor Tuning and a New Near-Ambient-Pressure XPS Approach to in Situ Examination of Thin-Film Surfaces Exposed to Reactive …

D Zanders, E Ciftyurek, E Subaşı… - … applied materials & …, 2019 - ACS Publications
A bottom-up approach starting with the development of new Hf precursors for plasma-
enhanced atomic layer deposition (PEALD) processes for HfO2 followed by in situ thin-film …

Recent advances using guanidinate ligands for chemical vapour deposition (CVD) and atomic layer deposition (ALD) applications

A Kurek, PG Gordon, S Karle, A Devi… - Australian Journal of …, 2014 - CSIRO Publishing
Volatile metal complexes are important for chemical vapour deposition (CVD) and atomic
layer deposition (ALD) to deliver metal components to growing thin films. Compounds that …

Highly self-oriented growth of (020) and (002) monoclinic HfO2 thick films using laser chemical vapor deposition

S Matsumoto, Y Kaneda, A Ito - Ceramics International, 2020 - Elsevier
Abstract Monoclinic hafnia (m-HfO 2) films were prepared on polycrystalline AlN substrates
via thermal and laser chemical vapor deposition (thermal CVD and laser CVD). Highly self …

Density functional theory study of the surface adsorption and dissociation of copper (I) acetamidinates on Cu (110) surfaces

J Guerrero-Sánchez, N Takeuchi… - The Journal of Physical …, 2019 - ACS Publications
Metal amidinates are common compounds with many applications, and are of particular
value as precursors for the chemical deposition of thin metal films on solid surfaces. In order …

Thermal chemistry of metal organic compounds adsorbed on oxide surfaces

B Chen, X Qin, C Lien, M Bouman, M Konh… - …, 2019 - ACS Publications
The thermal chemistry of several metal organic compounds with amidinate, diketonate, or
cyclopentadienyl (Cp) ligands on oxide surfaces, mainly on silicon dioxide but also on …