'Old Chemistries' for new applications: Perspectives for development of precursors for MOCVD and ALD applications
A Devi - Coordination chemistry reviews, 2013 - Elsevier
The concept of the transformation of molecules to materials has been well established in the
field of chemical vapor deposition (CVD) and atomic layer deposition (ALD). However …
field of chemical vapor deposition (CVD) and atomic layer deposition (ALD). However …
Recent progress in the chemistry of metal amidinates and guanidinates: syntheses, catalysis and materials
FT Edelmann - Advances in organometallic chemistry, 2013 - Elsevier
This review provides a comprehensive overview of the most recent progress in chemistry
and applications of metal complexes containing heteroallylic ligands such as amidinates …
and applications of metal complexes containing heteroallylic ligands such as amidinates …
Surface chemistry of copper (I) acetamidinates in connection with atomic layer deposition (ALD) processes
Q Ma, H Guo, RG Gordon, F Zaera - Chemistry of Materials, 2011 - ACS Publications
The thermal chemistry of copper (I)-N, N′-di-sec-butylacetamidinate on Ni (110) single-
crystal and cobalt polycrystalline surfaces was characterized under ultrahigh vacuum (UHV) …
crystal and cobalt polycrystalline surfaces was characterized under ultrahigh vacuum (UHV) …
Laser CVD Growth of Uniquely <010>‐oriented β‐Ga2O3 Films on Quartz Substrate with Ultrafast Photoelectric Response
The oriented growth of β‐Ga2O3 films has triggered extensive interest due to the remarkable
and complex anisotropy found in the β‐Ga2O3 bulks. Remarkable properties, including …
and complex anisotropy found in the β‐Ga2O3 bulks. Remarkable properties, including …
Guanidinates as Alternative Ligands for Organometallic Complexes
F Carrillo-Hermosilla, R Fernández-Galán, A Ramos… - Molecules, 2022 - mdpi.com
For decades, ligands such as phosphanes or cyclopentadienyl ring derivatives have
dominated Coordination and Organometallic Chemistry. At the same time, alternative …
dominated Coordination and Organometallic Chemistry. At the same time, alternative …
PEALD of HfO2 Thin Films: Precursor Tuning and a New Near-Ambient-Pressure XPS Approach to in Situ Examination of Thin-Film Surfaces Exposed to Reactive …
D Zanders, E Ciftyurek, E Subaşı… - … applied materials & …, 2019 - ACS Publications
A bottom-up approach starting with the development of new Hf precursors for plasma-
enhanced atomic layer deposition (PEALD) processes for HfO2 followed by in situ thin-film …
enhanced atomic layer deposition (PEALD) processes for HfO2 followed by in situ thin-film …
Recent advances using guanidinate ligands for chemical vapour deposition (CVD) and atomic layer deposition (ALD) applications
Volatile metal complexes are important for chemical vapour deposition (CVD) and atomic
layer deposition (ALD) to deliver metal components to growing thin films. Compounds that …
layer deposition (ALD) to deliver metal components to growing thin films. Compounds that …
Highly self-oriented growth of (020) and (002) monoclinic HfO2 thick films using laser chemical vapor deposition
S Matsumoto, Y Kaneda, A Ito - Ceramics International, 2020 - Elsevier
Abstract Monoclinic hafnia (m-HfO 2) films were prepared on polycrystalline AlN substrates
via thermal and laser chemical vapor deposition (thermal CVD and laser CVD). Highly self …
via thermal and laser chemical vapor deposition (thermal CVD and laser CVD). Highly self …
Density functional theory study of the surface adsorption and dissociation of copper (I) acetamidinates on Cu (110) surfaces
J Guerrero-Sánchez, N Takeuchi… - The Journal of Physical …, 2019 - ACS Publications
Metal amidinates are common compounds with many applications, and are of particular
value as precursors for the chemical deposition of thin metal films on solid surfaces. In order …
value as precursors for the chemical deposition of thin metal films on solid surfaces. In order …
Thermal chemistry of metal organic compounds adsorbed on oxide surfaces
The thermal chemistry of several metal organic compounds with amidinate, diketonate, or
cyclopentadienyl (Cp) ligands on oxide surfaces, mainly on silicon dioxide but also on …
cyclopentadienyl (Cp) ligands on oxide surfaces, mainly on silicon dioxide but also on …