Fully integrated pitch-matched AlScN PMUT-on-CMOS array for high resolution Ultrasound Images

E Ledesma, A Uranga, F Torres… - IEEE Sensors …, 2024 - ieeexplore.ieee.org
This article presents a fully integrated pitch-matched piezoelectric micromachined ultrasonic
transducers (PMUTs)-on-CMOS array with high potential in catheter-based ultrasound …

压电AlN MEMS 的新进展(续).

赵正平 - Micronanoelectronic Technology, 2024 - search.ebscohost.com
Si 基微电子机械系统(MEMS) 经过三十余年的发展已进入智能微系统的发展阶段,
已成为当今MEMS 技术创新发展的主流. 当今半导体材料技术的科研已进入超宽禁带半导体的 …

Design, Modelling, and Simulation of PMUT Device for Ultrasound Imaging Applications

U Kumar, SNS Dontaraju… - 2023 16th International …, 2023 - ieeexplore.ieee.org
In this work, a circular piezoelectric micromachined ultrasonic transducer (PMUT) suitable
for ultrasound imaging applications has been designed, modelled, and simulated using …