This paper discusses piezoelectric acoustic devices based on widely used piezoelectric
materials. Commonly used piezoelectric thin film deposition techniques and the influence of …

Piezoelectric materials have attracted considerable attention over the last two decades
because many technologies utilize their core properties of piezoelectric materials. Previous …

This paper presents a comprehensive literature survey of MEMS based piezoelectric
microphones along with the fabrication processes involved, application domains, and …

Microelectromechanical systems (MEMS)-based piezoresistive and capacitive microphones
have gained significant attention due to their miniaturization, high performance, and diverse …

This paper reports a novel method for fabrication of diaphragm along with microtunnels for
various applications. Micromasking, grass formation, uniformity over the process wafer …

The interaction of nanoparticles with biological systems can provide useful information about
their therapeutic applications. The aluminum nanoparticles (Al 2 O 3 NPs) were synthesized …

This paper reports a structural study of the ZnO thin film deposited on p-type silicon substrate
using radio frequency (RF) sputtering technique. The structural study of the deposited ZnO …

Noise could occur anywhere in the aerospace and other fields and has a great influence on
the operation of the aircraft. The control of the sound emission has attracted a lot of attention …

An acoustic vector sensor (AVS) is an underwater sound sensing device that converts
acoustic energy into electrical energy. It can measure both the pressure and motion of a …