[PDF][PDF] 激光直写制备衍射光学元件的研究及应用
梁广磊， 孙树峰， 王津， 姜明明， 张丰云， 王茜… - 红外与激光 …, 2023 - researching.cn
衍射光学元件作为一种典型的微光学元件, 其体积小, 质量轻, 设计自由度多, 成像质量良好,
在光学成像, 光学数据存储, 激光技术, 生物医学等领域具有广阔的应用前景 …
在光学成像, 光学数据存储, 激光技术, 生物医学等领域具有广阔的应用前景 …
[PDF][PDF] 离焦激光直写光刻工艺研究
李凤友， 卢振武， 谢永军， 张殿文， 裴苏… - Chinese Journal of …, 2002 - researching.cn
离焦激光直写光刻工艺研究 Page 1 文章编号:0258%7025(2002)09%0850%05 离焦激光直写光
刻工艺研究 李凤友,卢振武,谢永军,张殿文,裴苏,赵晶丽 (中国科学院长春光学精密机械和物理研究 …
刻工艺研究 李凤友,卢振武,谢永军,张殿文,裴苏,赵晶丽 (中国科学院长春光学精密机械和物理研究 …
High-resolution laser lithography system based on two-dimensional acousto-optic deflection
M Koechlin, G Poberaj, P Günter - Review of scientific instruments, 2009 - pubs.aip.org
We present an advanced high-resolution, compact laser lithography system for fast
prototyping of complex integrated optics devices comprising microring resonators and …
prototyping of complex integrated optics devices comprising microring resonators and …
Glass processing by ion exchange to fabricate integrated optical planar components: applications
J Linares, C Montero, V Moreno… - … Optics Devices IV, 2000 - spiedigitallibrary.org
Ion-Exchanged Glass Integrated Optics has received a considerably attention during the
laser years because of their well-known advantages. On the other hand, ion-exchanged …
laser years because of their well-known advantages. On the other hand, ion-exchanged …
Model of linewidth for laser writing on a photoresist
JR Salgueiro, V Moreno, J Linares - Applied optics, 2002 - opg.optica.org
We present a theoretical model to describe the feature size produced by direct laser writing
upon a photoresist relative to various experimental parameters. The model allows the …
upon a photoresist relative to various experimental parameters. The model allows the …