Diamond has numerous outstanding properties in mechanics, physics, chemistry,
electronics, thermodynamics, and spintronics for either classic micro/nanoelectromechanical …

Electrically integrable, high‐sensitivity, and high‐reliability magnetic sensors are not yet
realized at high temperatures (500° C). In this study, an integrated on‐chip single‐crystal …

A magneto-mechano-electric (MME) generator that converts an ambient magnetic field to
useable electricity has the potential as an autonomous power source for sensor networks …

In this work, a wafer-sized high-quality polycrystalline diamond is prepared using microwave
plasma chemical vapor deposition. Solar-blind photodetector arrays with 6× 6 cells are …

Young's modulus is a key parameter for mechanical engineering and always performs a
significant role in materials design. Diamond has been regarded as an ideal material for …

A resonator with a high Q factor is generally pursued in the single-crystal diamond (SCD)
microelectromechanical system (MEMS) for high-performance sensors. In this report, we …

Single-crystal diamond presents as an ideal semiconductor material for high-performance
and high-reliability MEMS devices, on account of its outstanding mechanical and physical …

Conspectus Microelectromechanical systems (MEMS) that integrate tiny mechanical devices
with electronics on a semiconductor substate have experienced explosive growth over the …

Single-crystal diamond (SCD) microelectromechanical systems (MEMS) resonators with
lower energy dissipation and higher quality (Q) factors have always been pursued for the …

Micro-cantilever beams have been widely used for surface sensing applications as well as
atomic force microscope. However, surface stress appears in cantilever beams due to a …