The Characterization and Passivation of Fixed Oxide Charges and Interface States in the MOS System

PK Hurley, É O'Connor, V Djara… - … on Device and …, 2013 - ieeexplore.ieee.org
In this paper, we present a review of experimental results examining charged defect
components in the Al 2 O 3/In 0.53 Ga 0.47 As metal-oxide-semiconductor (MOS) system …

1-nm-capacitance-equivalent-thickness HfO2/Al2O3/InGaAs metal-oxide-semiconductor structure with low interface trap density and low gate leakage current density

R Suzuki, N Taoka, M Yokoyama, S Lee… - Applied Physics …, 2012 - pubs.aip.org
We have studied the impact of the Al 2 O 3 inter-layer on interface properties of HfO
2/InGaAs metal-oxide-semiconductor (MOS) interfaces. We have found that the insertion of …

A systematic study of (NH4) 2S passivation (22%, 10%, 5%, or 1%) on the interface properties of the Al2O3/In0. 53Ga0. 47As/InP system for n-type and p-type In0 …

É O'Connor, B Brennan, V Djara, K Cherkaoui… - Journal of Applied …, 2011 - pubs.aip.org
In this work, we present the results of an investigation into the effectiveness of varying
ammonium sulphide (NH 4) 2 S concentrations in the passivation of n-type and p-type In …

Defect state passivation at III-V oxide interfaces for complementary metal–oxide–semiconductor devices

J Robertson, Y Guo, L Lin - Journal of Applied Physics, 2015 - pubs.aip.org
The paper describes the reasons for the greater difficulty in the passivation of interface
defects of III–V semiconductors like GaAs. These include the more complex reconstructions …

III–V/Ge channel MOS device technologies in nano CMOS era

S Takagi, R Zhang, J Suh, SH Kim… - Japanese Journal of …, 2015 - iopscience.iop.org
CMOS utilizing high-mobility III–V/Ge channels on Si substrates is expected to be one of the
promising devices for high-performance and low power advanced LSIs in the future …

Comparative Study of Atomic-Layer-Deposited Stacked (HfO2/Al2O3) and Nanolaminated (HfAlOx) Dielectrics on In0.53Ga0.47As

C Mahata, YC Byun, CH An, S Choi… - ACS Applied Materials …, 2013 - ACS Publications
The high-k gate dielectric structures in stacked (HfO2/Al2O3) and nanolaminated (HfAlO x)
forms with a similar apparent accumulation capacitance were atomic-layer-deposited on n …

III-V/Ge MOS device technologies for low power integrated systems

S Takagi, M Noguchi, M Kim, SH Kim, CY Chang… - Solid-State …, 2016 - Elsevier
CMOS utilizing high mobility III-V/Ge channels on Si substrates is expected to be one of the
promising devices for high performance and low power integrated systems in the future …

An investigation of capacitance-voltage hysteresis in metal/high-k/In0. 53Ga0. 47As metal-oxide-semiconductor capacitors

J Lin, YY Gomeniuk, S Monaghan, IM Povey… - Journal of Applied …, 2013 - pubs.aip.org
In this work, we present the results of an investigation into charge trapping in metal/high-k/In
0.53 Ga 0.47 As metal-oxide-semiconductor capacitors (MOS capacitors), which is analysed …

Passivation of interfacial defects at III-V oxide interfaces

L Lin, J Robertson - Journal of Vacuum Science & Technology B, 2012 - pubs.aip.org
The electronic structure of gap states has been calculated in order to assign the interface
states observed at III-V oxide interfaces. It is found that As-As dimers and Ga and As …

Realization of high-quality HfO2 on In0. 53Ga0. 47As by in-situ atomic-layer-deposition

TD Lin, YH Chang, CA Lin, ML Huang, WC Lee… - Applied Physics …, 2012 - pubs.aip.org
High κ dielectric of HfAlO/HfO 2 was an in-situ atomic-layer-deposited directly on molecular
beam epitaxy grown In 0.53 Ga 0.47 As surface without using pre-treatments or interfacial …