This paper presents a review of the radio frequency thin-film lithium niobate (LiNbO 3) based
acoustic microsystems. Thanks to their high electromechanical coupling (k 2), low loss, and …

This paper reports on the design, fabrication, and characterization of mode X-cut Lithium
Niobate Laterally Vibrating Resonators (LVRs) operating between 100 MHz and 1 GHz. In …

Bioengineering devices and systems will become a practical and versatile technology in
society when sustainability issues, primarily pertaining to their efficiency, sustainability, and …

This work reports an experimental study of acoustic loss in thin-film lithium niobate (LiNbO 3)
using acoustic delay lines (ADLs). Unlike prior resonator-based quality factor (Q) studies …

This work presents a low temperature coefficient of frequency (TCF) and high-performance
S4 mode acoustic resonator based on LiNbO3/SiO2/a-Si/Si (trap-rich layer assisted LiNbO3 …

This work presents an intensive study of passive voltage amplification offered by one-port
microelectromechanical systems (MEMS) piezoelectric resonators used as matching …

This work presents a new approach to design microelectromechanical system (MEMS)
resonators based on x-cut single-crystal lithium niobate (LiNbO 3) thin film to achieve ultra …

This letter reports on the passive voltage amplification provided by X-cut Lithium Niobate
(LN) mode resonators when implemented as Matching Networks (MN) in the front-end of …

This work reports on the design and fabrication of fundamental shear horizontal (SH0) mode
acoustic resonators based on a suspended lithium niobate (LNO) film at 1.04 GHz. Due to …

We report on the design and performance of the first prototypes of a new class of ultrahigh-
frequency (UHF) subharmonic tags (SubHTs) featuring identification capabilities. Our …