During the past decade, significant progress has been made in the field of resonant optics
ranging from fundamental aspects to concrete applications. While several techniques have …

Following Moores law, the performance of devices should double within a two‐year span,
which can either be done by reducing the size of the individual components or adapting the …

Focused electron beam induced deposition (FEBID) is an important synthesis method as it is
an extremely flexible tool for fabricating functional (3D) structures with nanometer spatial …

Nanoscale metal deposits written directly by electron-beam-induced deposition, or EBID, are
typically contaminated because of the incomplete removal of the original organometallic …

The gas flux direction in focused electron beam induced processes can strongly destabilize
the morphology on the nanometer scale. We demonstrate how pattern parameters such as …

The development of a new heating system dedicated to in situ scanning electron microscope
(SEM) experimentation at high temperatures is reported. This system, called FurnaSEM, is a …

We introduce a laser assisted electron beam induced deposition (LAEBID) process which is
a nanoscale direct write synthesis method that integrates an electron beam induced …

Platinum–carbon deposits made via electron-beam-induced deposition were purified via a
pulsed laser-induced oxidation reaction and erosion of the amorphous carbon to form pure …

One critical area for the adoption of extreme ultraviolet (EUV) lithography is the development
of appropriate mask repair strategies. To this end, we have explored focused electron beam …

Focused helium and neon ion (He+/Ne+) beam processing has recently been used to push
resolution limits of direct‐write nanoscale synthesis. The ubiquitous insertion of focused …