The development of polymer micromachining technologies that complement traditional
silicon approaches has enabled the broadening of microelectromechanical systems (MEMS) …

Commonly encountered problems in the manipulation of objects with robotic hands are the
contact force control and the setting of approaching motion. Microelectromechanical systems …

This work develops optimal sensor placement within a hybrid dense sensor network used in
the construction of accurate strain maps for large-scale structural components. Realization of …

Materials used to construct MEMS devices are critical because the structural material
properties determine fabrication processes and govern the device performance. While early …

The authors have recently developed a soft-elastomeric capacitive (SEC)-based thin film
sensor for monitoring strain on mesosurfaces. Arranged in a network configuration, the …

We report on the systematic comparative study of highly c-axis oriented and crystalline
piezoelectric ZnO thin films deposited on four different flexible substrates for vibration …

Structural health monitoring of mesoscale structures is difficult due to their large sizes and
often complex geometries. A solution to this challenge lies in the development of sensing …

This paper presents the design, fabrication process and characterization of a self-packaged
MEMS accelerometer on a flexible substrate. The novelty lies in that the accelerometer is …

We introduce a novel fabrication of a stretchable circuit based on a polydimethylsiloxane
(PDMS) substrate for wireless posture measurement. To prevent the typical emergence of …

The design and implementation of interdigital sensors in the sensing world have been
pivotal in the last few decades. Due to the advantages imparted by these designs …