This paper presents the development of a novel one-side-electrode-type fluidic-based
capacitive pressure sensor. A pressure sensor using a one-side-electrode and an …

Capacitive pressure sensors are widely used in a variety of applications and are built using
a variety of processes, including 3D printing technology. The use of this technology could …

Capacitive pressure sensors are making themselves the leader among its market
competitors since they consume less power with less temperature sensitivity. This paper …

In this paper, the design and fabrication techniques of a differential pressure sensor used in
precision air data module (ADM) are described, and its performance test results are …

This paper proposes the modeling analysis of MEMS highly sensitive Capacitive Differential
Pressure Sensor (CDPS) and also the development of a fabrication process for CDPS …

In this paper, various clamped models of square shaped diaphragm are discussed for
Intraocular pressure sensing application in the aspects of Mises Stress, deflection sensitivity …

In this paper, modeling of high sensitive capacitive differential pressure sensor (CDPS)
structure was proposed. The-working principle of CDPS was explained. Different types of …

基于MEMS 工艺, 提出了一种球冠形底部固定极板与复合膜可动上极板结合的电容式微机械
压力传感器. 改变了经典的上下电极接触过程, 并增加了深刻蚀工艺附加深孔结构 …

Novel micro pressure sensors require high sensitivity, anti-interference, reliability and
durability. However, due to some problems in mold making, digital signal process circuits …

This paper reports on modeling of high sensitive capacitive differential pressure sensor
without and with bossed polymide diaphragm membrane. Analysis was carried out for center …