Microfabricated electrostatic actuators are employed in a wide variety of
microelectromechanical systems (MEMS) for applications ranging from relays and switches …

In this paper, we demonstrate the application of sliding mode control to a two-axis gimbaled
MEMS. The micromirror is a two-axis gimbaled system electrostatically actuated by two pairs …

We demonstrate the application of a modified sliding mode control (SMC) scheme with time-
constant switching for MEMS micromirror control. This scheme yields substantial …

Enhancement of MEMS tunable capacitors using dielectric fluids is reported. Micromachined
tunable capacitors were tested and characterized in air and in mineral oil with a relative …

A micro–electro-mechanical system (MEMS)-based image stabilizer is proposed to
counteracting shaking in cell phone cameras. The proposed stabilizer (dimensions, 8.8× …

This work develops an image stabilizer (IS) that is fabricated using micro-electro-mechanical
system (MEMS) technology and is designed to counteract the vibrations when human using …

Presented is a microelectromechanical system-based thermal actuating image stabiliser.
The proposed stage has dimensions of 14.9× 14.9× 0.2 mm3 and contains a four-axis …

This work presents a MEMS-based image stabilizer applied for anti-shaking function in
photographic cell phones. The proposed stabilizer is designed as a two-axis decoupling XY …

We present an experimentally verified governing equation, which provides designers some
physical insights of rotary comb actuated microsystems. The degree of rotation depends on …

Theoretical and experimental results of a dielectric fluid application for electrostatic,
micromachined tunable capacitors are presented. Tunable comb-drive based capacitors …