An adjustable-stiffness MEMS force sensor: Design, characterization, and control
This paper presents a novel one-degree-of-freedom microelectromechanical systems
(MEMS) force sensor. The high-bandwidth device contains on-chip sensing and actuation …
(MEMS) force sensor. The high-bandwidth device contains on-chip sensing and actuation …
Double-actuator position-feedback mechanism for adjustable sensitivity in electrostatic-capacitive MEMS force sensors
This paper presents a novel double-actuator position-feedback mechanism for micro electro-
mechanical electrostatic-capacitive force sensors. Compared to a single-actuator position …
mechanical electrostatic-capacitive force sensors. Compared to a single-actuator position …
A current-mode transimpedance amplifier for capacitive sensors
A Current-Mode (CM) TransImpedance Amplifier (TIA) based on Second Generation Current
Conveyors (CCIIs) for capacitive microsensor measurements is presented. The designed …
Conveyors (CCIIs) for capacitive microsensor measurements is presented. The designed …