Deep reactive ion etching of Z-cut alpha quartz for MEMS resonant devices fabrication
B Li, C Li, Y Zhao, C Han, Q Zhang - Micromachines, 2020 - mdpi.com
Quartz is widely used in microelectromechanical systems (MEMS). Especially, MEMS quartz
resonators are applied to sensors and serve as sensitive elements. The capability of deep …
resonators are applied to sensors and serve as sensitive elements. The capability of deep …
Research on a micro-processing technology for fabricating complex structures in single-crystal quartz
C Han, C Li, Y Zhao, B Li, X Wei - Micromachines, 2020 - mdpi.com
Single-crystal quartz material is widely applied in the manufacture of resonators and
sensors, but it is difficult to process because of its high hardness. A novel way to fabricate …
sensors, but it is difficult to process because of its high hardness. A novel way to fabricate …
蓝宝石晶体湿法刻蚀各向异性研究与机理分析.
张辉， 钱珺， 洪莉莉 - Journal of Synthetic Crystals, 2023 - search.ebscohost.com
当前蓝宝石各向异性刻蚀规律还没有获得完整揭示, 其刻蚀微结构演化过程和形貌结构很难实现
准确预测和控制, 给蓝宝石衬底图案化结构加工成型和质量控制带来很大的挑战 …
准确预测和控制, 给蓝宝石衬底图案化结构加工成型和质量控制带来很大的挑战 …