Since two decades piezoelectric MEMS resonator research has been making a headway by
leaps and bounds in multiple fronts such as micro/nanofabrication techniques, device and …

Photons with optical frequencies of a few hundred terahertz are perhaps the only way to
distribute quantum information over long distances. Superconducting qubits, which are one …

In recent years, there has been an increased interest in continuous monitoring of patients
and their Implanted Medical Devices (IMDs) with different wireless technologies such as …

A piezoelectric thin-film suspended above a carrier substrate. An input interdigital transducer
(IDT) having first interdigitated electrodes is disposed at different locations along the …

Since the advent of the laser, acousto-optic modulators have been an important tool for
controlling light. Recent advances in on-chip lithium niobate waveguide technology present …

Connecting nanoscale mechanical resonators to microwave quantum circuits opens new
avenues for storing, processing, and transmitting quantum information. In this work, we …

We demonstrate the first acousto-optic modulators in lithium niobate films on sapphire,
detailing the dependence of the piezoelectric and optomechanical coupling coefficients on …

The performance of inductors at high frequencies and small sizes is one of the largest
limiting factors in the continued miniaturization of dc-dc converters. Piezoelectric resonators …

This paper reports on the investigation of 1 μm thick films of 20% Scandium-doped
Aluminum Nitride (ScAlN) for the making of piezoelectric MEMS laterally vibrating resonators …

We present a piezoelectric transducer in thin-film lithium niobate that converts a 1.7-GHz
microwave signal to a mechanical wave in a single mode of a 1-μ m-wide waveguide. We …