As high-precision measuring instruments have developed, interferometers have been widely
applied in the measurement of lengths and of the shape of surfaces, with nanometer …

In the field of dimensional metrology, significant technical challenges have been
encountered with regard to large-scale object assembly, satellite positioning, control of the …

Where conventional testing and inspection techniques fail at the micro-scale, optical
techniques provide a fast, robust, and relatively inexpensive alternative for investigating the …

4. 5 23s46 A 6/1985 Breckinridge et al. test Surface in a second mode of operation that
interferometri 4.576. 479 A 3, 1986 Downs cally profiles a topography of the test Surface …

Measurement of surface topography plays an important role in manufacturing, being used
for both the control of manufacturing processes and for final product acceptance. These …

We introduce a new optical interferometry system for fast areal surface measurement of
microscale and nanoscale surfaces that are immune to environmental noise. Wavelength …

(51) Int. Cl. G0IB II/02(2006.01) A method including comparing information derivable from
(52) US Cl 356/5.11: 356/497 a scanning interferometry signal for a first Surface location irr …

A simultaneous volumetric thickness-profile measurement method based on an acousto-
optic tunable filter for transparent film deposited upon pattern structures is described. The …

We report on processing the spectral interference signals by a new method based on a
windowed Fourier transform applied in the wavelength domain. First, the numerical …

Disclosed is an interferometry analysis method that includes comparing information
derivable from multiple interferometry signals corresponding to different surface locations of …