Review on the modeling of electrostatic MEMS

WC Chuang, HL Lee, PZ Chang, YC Hu - Sensors, 2010 - mdpi.com
Electrostatic-driven microelectromechanical systems devices, in most cases, consist of
couplings of such energy domains as electromechanics, optical electricity, thermoelectricity …

Reliability of MEMS in shock environments: 2000–2020

T Peng, Z You - Micromachines, 2021 - mdpi.com
The reliability of MEMS in shock environments is a complex area which involves structural
dynamics, fracture mechanics, and system reliability theory etc. With growth in the use of …

[HTML][HTML] Fracture of solar-grade anisotropic polycrystalline Silicon: A combined phase field–cohesive zone model approach

M Paggi, M Corrado, J Reinoso - Computer Methods in Applied Mechanics …, 2018 - Elsevier
This work presents a novel computational framework to simulate fracture events in brittle
anisotropic polycrystalline materials at the microscopical level, with application to solar …

Destructive reliability analysis of electromagnetic MEMS micromirror under vibration environment

XY Fang, XY Li, KM Hu, G Yan, JH Wu… - IEEE Journal of …, 2021 - ieeexplore.ieee.org
Micro-Electro-Mechanical Systems (MEMS) micro-mirrors have shown great potential in
consumer applications, such as Light Detection and Ranging (LiDAR) devices and portable …

Investigation and experiment of high shock packaging technology for High-G MEMS accelerometer

Y Shi, X Wen, Y Zhao, R Zhao, H Cao… - IEEE Sensors …, 2020 - ieeexplore.ieee.org
High-G MEMS accelerometer (HGMA) has applications in aerospace, explosive and
penetrative environments, and so on. Reliable encapsulation is the basis of ensuring the …

Non-linear mechanics in resonant inertial micro sensors

C Comi, V Zega, A Corigliano - International Journal of Non-Linear …, 2020 - Elsevier
Abstract Microsystems (or Micro Electro Mechanical Systems, MEMS) are important
components of many popular products in the consumer market and are one of the enabling …

Evaluation of residual stress in MEMS Micromirror Die surface mounting process and shock destructive reliability test

XY Fang, CC Liu, XY Li, JH Wu, KM Hu… - IEEE Sensors …, 2023 - ieeexplore.ieee.org
Light detection and ranging (LiDAR) devices based on micro-electromechanical systems
(MEMS) micromirrors have been promising sensors for automatic driving due to the …

The wear rates and performance of three mold insert materials

ZW Zhong, MH Leong, XD Liu - Materials & Design, 2011 - Elsevier
In this study, a rapidly solidified aluminum alloy was compared with beryllium copper and
6061 aluminum alloys in terms of their wear rates, hardness and performance as mold insert …

Overall elastic properties of polysilicon films: A statistical investigation of the effects of polycrystal morphology

S Mariani, R Martini, A Ghisi… - … Journal for Multiscale …, 2011 - dl.begellhouse.com
In this paper we investigate the effects of polycrystal morphology on the overall properties of
polysilicon. Focusing on two-dimensional representative volume elements (RVEs) of …

Monte Carlo simulation of micro-cracking in polysilicon MEMS exposed to shocks

S Mariani, R Martini, A Ghisi, A Corigliano… - International Journal of …, 2011 - Springer
In this work we exploit a multi-scale framework to model the shock-induced failure of
polysilicon micro electro-mechanical systems (MEMS), and study the impact of uncertainties …