Review on the modeling of electrostatic MEMS
Electrostatic-driven microelectromechanical systems devices, in most cases, consist of
couplings of such energy domains as electromechanics, optical electricity, thermoelectricity …
couplings of such energy domains as electromechanics, optical electricity, thermoelectricity …
Reliability of MEMS in shock environments: 2000–2020
T Peng, Z You - Micromachines, 2021 - mdpi.com
The reliability of MEMS in shock environments is a complex area which involves structural
dynamics, fracture mechanics, and system reliability theory etc. With growth in the use of …
dynamics, fracture mechanics, and system reliability theory etc. With growth in the use of …
[HTML][HTML] Fracture of solar-grade anisotropic polycrystalline Silicon: A combined phase field–cohesive zone model approach
This work presents a novel computational framework to simulate fracture events in brittle
anisotropic polycrystalline materials at the microscopical level, with application to solar …
anisotropic polycrystalline materials at the microscopical level, with application to solar …
Destructive reliability analysis of electromagnetic MEMS micromirror under vibration environment
Micro-Electro-Mechanical Systems (MEMS) micro-mirrors have shown great potential in
consumer applications, such as Light Detection and Ranging (LiDAR) devices and portable …
consumer applications, such as Light Detection and Ranging (LiDAR) devices and portable …
Investigation and experiment of high shock packaging technology for High-G MEMS accelerometer
High-G MEMS accelerometer (HGMA) has applications in aerospace, explosive and
penetrative environments, and so on. Reliable encapsulation is the basis of ensuring the …
penetrative environments, and so on. Reliable encapsulation is the basis of ensuring the …
Non-linear mechanics in resonant inertial micro sensors
Abstract Microsystems (or Micro Electro Mechanical Systems, MEMS) are important
components of many popular products in the consumer market and are one of the enabling …
components of many popular products in the consumer market and are one of the enabling …
Evaluation of residual stress in MEMS Micromirror Die surface mounting process and shock destructive reliability test
XY Fang, CC Liu, XY Li, JH Wu, KM Hu… - IEEE Sensors …, 2023 - ieeexplore.ieee.org
Light detection and ranging (LiDAR) devices based on micro-electromechanical systems
(MEMS) micromirrors have been promising sensors for automatic driving due to the …
(MEMS) micromirrors have been promising sensors for automatic driving due to the …
The wear rates and performance of three mold insert materials
ZW Zhong, MH Leong, XD Liu - Materials & Design, 2011 - Elsevier
In this study, a rapidly solidified aluminum alloy was compared with beryllium copper and
6061 aluminum alloys in terms of their wear rates, hardness and performance as mold insert …
6061 aluminum alloys in terms of their wear rates, hardness and performance as mold insert …
Overall elastic properties of polysilicon films: A statistical investigation of the effects of polycrystal morphology
In this paper we investigate the effects of polycrystal morphology on the overall properties of
polysilicon. Focusing on two-dimensional representative volume elements (RVEs) of …
polysilicon. Focusing on two-dimensional representative volume elements (RVEs) of …
Monte Carlo simulation of micro-cracking in polysilicon MEMS exposed to shocks
In this work we exploit a multi-scale framework to model the shock-induced failure of
polysilicon micro electro-mechanical systems (MEMS), and study the impact of uncertainties …
polysilicon micro electro-mechanical systems (MEMS), and study the impact of uncertainties …