Crystallinity of inorganic films grown by atomic layer deposition: Overview and general trends
V Miikkulainen, M Leskelä, M Ritala… - Journal of Applied …, 2013 - pubs.aip.org
Atomic layer deposition (ALD) is gaining attention as a thin film deposition method, uniquely
suitable for depositing uniform and conformal films on complex three-dimensional …
suitable for depositing uniform and conformal films on complex three-dimensional …
Synthesis of doped, ternary, and quaternary materials by atomic layer deposition: a review
In the past decade, atomic layer deposition (ALD) has become an important thin film
deposition technique for applications in nanoelectronics, catalysis, and other areas due to its …
deposition technique for applications in nanoelectronics, catalysis, and other areas due to its …
[HTML][HTML] Atomic layer deposition of functional multicomponent oxides
Advances in the fabrication of multicomponent oxide thin films are crucial to prepare specific
compositions with precise structures and controlled interfaces. This will enable the …
compositions with precise structures and controlled interfaces. This will enable the …
Advanced CMOS gate stack: Present research progress
The decreasing sizes in complementary metal oxide semiconductor (CMOS) transistor
technology require the replacement of SiO2 with gate dielectrics that have a high dielectric …
technology require the replacement of SiO2 with gate dielectrics that have a high dielectric …
Structural and optical properties of lanthanide oxides grown by atomic layer deposition (ln= pr, nd, sm, eu, tb, dy, ho, er, tm, yb)
Ln2O3 thin films with optically active f-electrons (Ln= Pr, Nd, Sm, Eu, Tb, Dy, Ho, Er, Tm, Yb)
have been grown on Si (100) and soda lime glass substrates by atomic layer deposition …
have been grown on Si (100) and soda lime glass substrates by atomic layer deposition …
Cluster compounds of rare-earth elements
Z Zheng - Handbook on the Physics and Chemistry of Rare …, 2010 - Elsevier
Polynuclear complexes of rare-earth elements characterized by their well-defined, cluster-
like core structures are a class of interesting compounds with pleasing molecular structures …
like core structures are a class of interesting compounds with pleasing molecular structures …
Chemical synthesis of complex oxide thin films and freestanding membranes
P Salles, P Machado, P Yu, M Coll - Chemical Communications, 2023 - pubs.rsc.org
Oxides offer unique physical and chemical properties that inspire rapid advances in
materials chemistry to design and nanoengineer materials compositions and implement …
materials chemistry to design and nanoengineer materials compositions and implement …
Atomic scale growth of GdFeO3 perovskite thin films
Thin films of multiferroic gadolinium orthoferrite (GdFeO 3) are of significant interest due to
intrinsic coupling of magnetic and ferroelectric order in their monolithic bimetallic structures …
intrinsic coupling of magnetic and ferroelectric order in their monolithic bimetallic structures …
Atomic layer deposition of CaB 2 O 4 films using bis (tris (pyrazolyl) borate) calcium as a highly thermally stable boron and calcium source
MJ Saly, F Munnik, CH Winter - Journal of Materials Chemistry, 2010 - pubs.rsc.org
The atomic layer deposition of CaB2O4 was carried out using bis (tris (pyrazolyl) borate)
calcium (CaTp2) and water as precursors. CaTp2 melts at 280° C, undergoes solid state …
calcium (CaTp2) and water as precursors. CaTp2 melts at 280° C, undergoes solid state …
Simple and Efficient Synthesis of a Nd:LaAlO3 NIR Nanophosphor from Rare Earth Alkoxo-Monoaluminates Ln2Al2(OiPr)12(iPrOH)2 Single Source …
Nanoparticles of a Nd-doped LaAlO3 perovskite can be obtained rapidly and with
quantitative yield using the Bradley (ether elimination) treatment of a mixture of individual …
quantitative yield using the Bradley (ether elimination) treatment of a mixture of individual …