Optical methods that provide high diffraction image quality with a spatial resolution of
several to tens of nanometers and are in demand in such areas as projection lithography, X …

Aperiodic multilayer structures in soft X-ray optics - IOPscience This site uses cookies. By
continuing to use this site you agree to our use of cookies. To find out more, see our Privacy and …

Extreme ultraviolet and soft X-ray (XUV) multilayer optics have experienced significant
development over the past few years, particularly on controlling the spectral characteristics …

Aperiodic multilayers have been designed for various applications, using numeric
algorithms and analytical solutions, for many years with varying levels of success. This work …

According to the optics requirements of an EUVL tool, the accurate deposition of high
reflective and laterally graded multilayers on ultraprecise polished substrates can be …

The optical properties of a-periodic, depth-graded multilayer mirrors operating at 13.5 nm
wavelength are investigated using different compositions and designs to provide a constant …

We present first experimental results on the fabrication and characterization of depth-graded
X-ray multilayers providing a broad and well-defined reflectivity profile. Following a …

Wideband multilayers designed for various applications in hard X-ray to Extreme UV
spectral regions are based on a layered system with layer thicknesses varying largely in …

Nonperiodic molybdenum/silicon broadband multilayer polarizers have been designed
using numerical optimization algorithm and fabricated using direct current magnetron …

This paper is focused on recent progress in the development of broad-band multilayer
coatings designed for hard X-ray energies, for use in future astronomical telescopes. We …