An acceleration transducer, or accelerometer, is a sensor typically utilized for measuring
acceleration forces. These forces may be static, like the constant force of gravity, or they can …

A microelectromechanical system (MEMS) device that reduces or eliminates stiction
includes a substrate and a movable element at least partially suspended above the …

An embodiment is a method for forming a microelectromechanical system (MEMS) device.
The method comprises forming a MEMS structure over a first substrate, wherein the MEMS …

This disclosure provides systems, methods and apparatus, including computer programs
encoded on computer storage media, for making and using gyroscopes. Such gyroscopes …

(57) ABSTRACT A micromechanical yaw-rate sensor comprising a first yaw rate sensor
element, which outputs a first sensor signal, which contains information about a rotation …

A system and/or method for utilizing mechanical motion limiters to control proof mass
amplitude in MEMS devices (eg, MEMS devices having resonant MEMS structures, for …

2011-02-04 Assigned to QUALCOMM MEMS TECHNOLOGIES, INC. reassignment
QUALCOMM MEMS TECHNOLOGIES, INC. ASSIGNMENT OF ASSIGNORS INTEREST …

BACKGROUND Sensor devices which have a number of sensor substrates having different
sensor structures for detecting various char acteristics are being increasingly used in various …

(57) ABSTRACT A dynamic quantity sensor includes a force receiving portion, a first
movable portion that rotates in a first rotational direc tion around a first rotational axis …

A micromechanical component which has a substrate, a seismic mass, which is deflectably
situated on the substrate, and a stop structure for limiting a deflection of the seismic mass in …