The Knudsen pump (KP) is a kind of micro-pump that can form thermally induced flows
induced by temperature fields in rarefied gas environments. It has the advantages of having …

As a powerful tool in scientific research and industrial technologies, the cold atom absolute
gravity sensor (CAGS) based on cold atom interferometry has been proven to be the most …

This paper is a review that surveys work on the fabrication of miniature alkali vapor cells for
miniature and chip-scale atomic clocks. Technology on microelectromechanical systems …

Field emission coupled with molecular dynamics simulation (FEcMD) software package is a
computational tool for studying the electron emission characteristics and the atomic structure …

This paper is the first comprehensive review on microelectromechanical systems (MEMS)
vacuum pumps. Pumping of gases and generation of vacuum in micro-scaled devices are …

The high-vacuum self-pumping MEMS cell for atomic spectroscopy presented here is the
result of the technological achievements of the author and the research group in which he …

This work describes construction, technology, working principle and properties of an ion
source dedicated to a miniature MEMS (Micro-Electro-Mechanical System) mass …

This article presents simulation and experimental results on the generation of X-rays on a
MEMS target. The influence of the target material, target thickness, and electron beam …

We report the design, modelling, and proof-of-concept demonstration of a continuously fed,
atmospheric-pressure microplasma metal sputterer that is capable of printing conductive …

In this study, we design a highly efficient plasma source using a magnetic mirror trap with
two opposing permanent magnets for a miniature high-efficiency ion pump. First, we …