Crossing frequency method applicable to intermediate pressure plasma diagnostics using the cutoff probe
S Kim, J Lee, Y Lee, C Cho, S You - Sensors, 2022 - mdpi.com
Although the recently developed cutoff probe is a promising tool to precisely infer plasma
electron density by measuring the cutoff frequency (f cutoff) in the S 21 spectrum, it is …
electron density by measuring the cutoff frequency (f cutoff) in the S 21 spectrum, it is …
Effect of an inhomogeneous electron density profile on the transmission microwave frequency spectrum of the cutoff probe
The cutoff probe (CP), which precisely measures electron density from a microwave
transmission (S 21) spectrum, has been successfully developed through physical models …
transmission (S 21) spectrum, has been successfully developed through physical models …
An electrostatic model of the cutoff probe
Although a circuit model of the previously developed cutoff probe for plasma diagnostics
elucidates the basic physics and contributes to the development of the cutoff probe, a …
elucidates the basic physics and contributes to the development of the cutoff probe, a …
Analysis on crossing frequency in transmission microwave frequency spectrum of the cutoff probe
S Kim, Y Lee, C Cho, I Seong, W Jeong, J Lee… - Physics of …, 2023 - pubs.aip.org
Recently, we developed a crossing frequency method using the cutoff probe, which is
believed as applicable for measuring electron density regardless of chamber pressures …
believed as applicable for measuring electron density regardless of chamber pressures …
In situ monitoring of plasma ignition step during photoresist stripping using O2/N2 and O2/Ar
KE Kim, JE Kang, SJ Hong - Journal of the Korean Physical Society, 2023 - Springer
The formation of ions and radicals is determined by plasma parameters defined in terms of
electron temperature and electron density. Typically, invasive methods (Langmuir probes …
electron temperature and electron density. Typically, invasive methods (Langmuir probes …
Fast measurement of a pulsed plasma using a Fourier cutoff probe
A new method for time-resolved measurement of pulsed plasmas is suggested for reducing
the measurement time. A short impulse has a broadband spectrum, and it can be used to …
the measurement time. A short impulse has a broadband spectrum, and it can be used to …
Time Resolution of Fourier Cutoff Probe for Electron Density Measurement
BG Na, GH Yu, DU Kim, DH Yu, SJ Yu… - Proceedings of the …, 2012 - koreascience.kr
컷오프 진단법은 두 개의 탐침 형태로 제작된 마이크로 웨이브 진단법으로, 간단한 수식을 통해
전자밀도, 전자온도 등을 측정할 수 있다. 컷오프 탐침은 방사 안테나, 측정 안테나와 네트워크 …
전자밀도, 전자온도 등을 측정할 수 있다. 컷오프 탐침은 방사 안테나, 측정 안테나와 네트워크 …
[引用][C] Time Resolution of Fourier Cutoff Probe for Electron Density Measurement
나병근， 유광호， 김대웅， 유대호， 유신재… - 한국진공학회학술 …, 2012 - dbpia.co.kr
컷오프 진단법은 두 개의 탐침 형태로 제작된 마이크로 웨이브 진단법으로, 간단한 수식을통해
전자밀도, 전자온도 등을 측정할 수 있다. 컷오프 탐침은 방사 안테나, 측정 안테나와 네트워크 …
전자밀도, 전자온도 등을 측정할 수 있다. 컷오프 탐침은 방사 안테나, 측정 안테나와 네트워크 …