Optimal design and analysis of a new thermally actuated microscanner of high precision
WL Gambin, A Zarzycki - International Journal for Simulation and …, 2008 - ijsmdo.org
A design of a precise, thermally actuated microscanner is proposed, and next, its thermal
and mechanical behaviour is considered. The device consists of a micromirror and four …
and mechanical behaviour is considered. The device consists of a micromirror and four …