Anodic dissolution of copper in dilute hydroxylamine solutions: application to electrochemical mechanical planarisation of copper
A Muthukumaran, N Venkataraman… - Corrosion …, 2009 - Taylor & Francis
The effect of anodic polarisation on dissolution of copper in hydroxylamine based chemical
systems has been studied using a quartz crystal microbalance technique to evaluate their …
systems has been studied using a quartz crystal microbalance technique to evaluate their …