The motivation of the current paper is to provide a detailed review of crucial topics in micro-
and nanoscale gas flows, ie, velocity slip and temperature jump phenomena and their …

The tendency of the entropy to a maximum as an isolated system is relaxed to the
equilibrium (the second law of thermodynamics) has been known since the mid-19th …

The previous chapters presented detailed derivations of various sets of transport equations,
and here we take a step back and collect the equations on a few pages. The chapter begins …

The paper presents an overview and reports the recent progress of research on squeeze
film air damping in MEMS. The review starts with the governing equations of squeeze film air …

Accurate modeling of gas microflow is crucial for the microfluidic devices in MEMS. Gas
microflows through these devices are often in the slip and transition flow regimes …

By taking into account the inhomogeneity introduced by the presence of a solid boundary,
slip-flow theory extends the range of applicability of the venerable Navier–Stokes …

This article discusses the development of continuum models to describe processes in gases
in which the particle collisions cannot maintain thermal equilibrium. Such a situation typically …

In the past few decades, numerous heat conduction models extending beyond Fourier's
have been developed to account for large gradients, fast phenomena, wave propagation …

Quasi-gas-dynamic Equations Page 1 Chapter 3 Quasi-gas-dynamic Equations In this
chapter, we present two variants of constructing the quasi-gas-dynamic system, which allow us …

We perform gas flow experiments in a shallow microchannel, 1.14±0.02 μm deep, 200 μm
wide, etched in glass and covered by an atomically flat silicon wafer. The dimensions of the …