Nanopositioners are high-precision mechatronic devices that are capable of generating
mechanical motion with nanometer or sub-nanometer resolution. With this motion typically …

We present a control scheme for video-rate atomic force microscopy with rosette pattern. The
controller structure involves a feedback internal-model-based controller and a feedforward …

In this paper, we show that a hybrid integrator-gain system (HIGS) is a nonlinear negative
imaginary (NNI) system. We prove that the positive feedback interconnection of a linear …

In this article, we propose a new approach to address the control problem for negative
imaginary (NI) systems by using hybrid integrator-gain systems (HIGSs). We investigate the …

This paper presents a novel one-degree-of-freedom microelectromechanical systems
(MEMS) force sensor. The high-bandwidth device contains on-chip sensing and actuation …

The atomic force microscope (AFM) is an invaluable scientific tool; however, its conventional
implementation as a relatively costly macroscale system is a barrier to its more widespread …

Active microcantilevers with on-chip sensing and actuation capabilities provide significant
advantages in tapping-mode atomic force microscopy. The collocated transduction in active …

We demonstrate the application of the internal model principle in tracking a sequential
cycloid trajectory to achieve video-rate atomic force microscope (AFM) imaging. To generate …

We present a microelectromechanical system (MEMS)-based closed-loop force sensor,
capable of measuring bidirectional forces along one axis of motion. The device comprises …

We present an analysis and a systematic design methodology for a novel nonraster scan
method based on a rosette pattern and demonstrate its application in video-rate atomic force …