Multimodal atomic force microscopy with optimized higher eigenmode sensitivity using on-chip piezoelectric actuation and sensing

MG Ruppert, SI Moore, M Zawierta, AJ Fleming… - …, 2019 - iopscience.iop.org
Atomic force microscope (AFM) cantilevers with integrated actuation and sensing provide
several distinct advantages over conventional cantilever instrumentation. These include …

Soft three-dimensional microscale vibratory platforms for characterization of nano-thin polymer films

K Nan, H Wang, X Ning, KA Miller, C Wei, Y Liu, H Li… - ACS …, 2018 - ACS Publications
Vibrational resonances of microelectromechanical systems (MEMS) can serve as means for
assessing physical properties of ultrathin coatings in sensors and analytical platforms. Most …

On-chip feedthrough cancellation methods for microfabricated AFM cantilevers with integrated piezoelectric transducers

MB Coskun, AG Fowler, M Maroufi… - Journal of …, 2017 - ieeexplore.ieee.org
Active microcantilevers with on-chip sensing and actuation capabilities provide significant
advantages in tapping-mode atomic force microscopy. The collocated transduction in active …

Active atomic force microscope cantilevers with integrated device layer piezoresistive sensors

MG Ruppert, AJ Fleming, YK Yong - Sensors and Actuators A: Physical, 2021 - Elsevier
Active atomic force microscope cantilevers with on-chip actuation and sensing provide
several advantages over passive cantilevers which rely on piezoacoustic base-excitation …

Note: Guaranteed collocated multimode control of an atomic force microscope cantilever using on-chip piezoelectric actuation and sensing

MG Ruppert, YK Yong - Review of Scientific Instruments, 2017 - pubs.aip.org
The quality (Q) factor is an important parameter of the resonance of the microcantilever as it
determines both imaging bandwidth and force sensitivity. The ability to control the Q factor of …

AFM Cantilever Design for Multimode Q Control: Arbitrary Placement of Higher Order Modes

SI Moore, MG Ruppert, YK Yong - IEEE/ASME Transactions on …, 2020 - ieeexplore.ieee.org
In the fast growing field of multifrequency atomic force microscopy (AFM), the benefits of
using higher order modes have been extensively reported on. However, higher modes of …

Simultaneous tip force and displacement sensing for AFM cantilevers with on-chip actuation: Design and characterization for off-resonance tapping mode

NFS de Bem, MG Ruppert, AJ Fleming… - Sensors and Actuators A …, 2022 - Elsevier
The use of integrated on-chip actuation simplifies the identification of a cantilever
resonance, can improve imaging speed, and enables the use of smaller cantilevers, which is …

Experimental analysis of tip vibrations at higher eigenmodes of QPlus sensors for atomic force microscopy

MG Ruppert, D Martin-Jimenez, YK Yong, A Ihle… - …, 2022 - iopscience.iop.org
QPlus sensors are non-contact atomic force microscope probes constructed from a quartz
tuning fork and a tungsten wire with an electrochemically etched tip. These probes are self …

Characterization of active microcantilevers using laser doppler vibrometry

MG Ruppert, NFSD Bem, AJ Fleming… - Vibration Engineering for a …, 2021 - Springer
Active atomic force microscope cantilevers with on-chip actuation and sensing provide
several advantages over passive cantilevers which rely on piezoacoustic base-excitation …

Integrated force and displacement sensing in active microcantilevers for off-resonance tapping mode atomic force microscopy

NFS de Bem, MG Ruppert, YK Yong… - … and Robotics at Small …, 2020 - ieeexplore.ieee.org
Integrated on-chip actuation and sensing in micro-cantilevers for atomic force microscopy
(AFM) allows faster scanning speeds, cleaner frequency responses and smaller cantilevers …