Laser-induced backside wet etching (LIBWE) of a silicate glass surface at interface with a
strongly absorbing aqueous dye solution is studied. The process of crater formation and the …

In laser-induced backside wet etching (LIBWE), the liquid absorbent indirectly heats the
transparent material, causing explosive phase change and cavitation. Accordingly, the …

The present top-down/bottom-up techniques (like e-beam, ion-beam, and etching) for
nano/microfabrication require expensive equipment, highly trained labor, and time …

High-precision and low-damage machining of transparent materials is one of the challenges
of current laser materials processing to enable new applications in ultraprecise surface …

The features and mechanisms of microcrater formation in optical silicate glass by laser-
induced backside wet etching (LIBWE) are determined in a wide range of energy densities …

The fabrication of sub-micron and nanopatterns at large surface areas by lasers is still a
challenge, but the use of laser-induced, self-organized processes provides a promising …

The well-controlled fabrication of microtrenches including inclined features using normal
incidence with gradual shifting of the irradiated area was demonstrated. Based on the …

An indirect laser processing, laser-induced backside wet etching (LIBWE) is one of effective
techniques for flexible laser-direct-write (LDW) type micromachining of transparent …

Laser-induced backside wet etched fused silica surfaces were characterized by X-ray
photoelectron spectroscopy (XPS) and ellipsomerty, and a new numerical model was …

For crack-free marking of glass materials, a beam-scanning laser-induced backside wet
etching (LIBWE) process by a beam spot with a fine periodic structure was examined. The …