Design and simulation of a tunable comb-drive actuator with a wide frequency tuning range and low pull-in voltage
S Taherian, E Gholinataj-Jelodar, Y Yuan - Physica Scripta, 2024 - iopscience.iop.org
The presented paper describes the design, simulation, and analysis of a novel tunable comb-
drive actuator that aims to increase the range of tuning resonance frequency while reducing …
drive actuator that aims to increase the range of tuning resonance frequency while reducing …